Centre National De La Recherche Scientifique

Keysight Technologies, Inc.

Bernard Legrand

Hassan Tanbakuchi

Damien Ducatteau

Didier Theron

Didier Stievenard

Christophe Delerue

A system for detecting responses of a MEMS resonator device includes first and second signal sources, a signal divider and a frequency mixer. The first signal source provides a first signal and the second signal source provides a second signal that electrostatically drives the MEMS resonator device, causing mechanical vibration. The signal divider divides the first signal into a probe signal and a local oscillator (LO) signal, the probe signal being applied to the MEMS resonator device and reflected by a capacitance of the MEMS resonator device. A reflection coefficient is modulated onto the reflected probe signal at the mechanical resonance frequency by variations in the capacitance induced by the mechanical vibration of the MEMS resonator device. The frequency mixer mixes the reflected probe signal and the LO signal and outputs an intermediate frequency (IF) signal, which represents modulation of the reflection coefficient, providing an image of the mechanical vibration.

Detecting responses of micro-electromechanical system (MEMS) resonator device

A semiconductor infrared detector includes in the following order: a semiconductor substrate; a layer of electrically insulating material; and patterns formed in a semiconductor layer. The patterns are formed from at least one island that is connected to bridges which are connected to polarization electrodes. The bridges are lines having an approximately constant width l and the islands are zones having a width l that is greater than that of the lines.

Semiconductor infrared detector and method for the production thereof

Growing community of inventors

Lille, France

Bernard Legrand