Motorola Corporation

Freescale Semiconductor,inc.

Bernard J Roman

Bich-Yen Nguyen

Wei E Wu

Kevin D Lucas

Alfred J Reich

Michael E Kling

Jung-Hui Lin

Chandrasekaram Ramiah

Papu D Maniar

Scott S Roth

Carlos A Mazure

Robert W Fiordalice

Kent J Cooper

Wayne J Ray

Kevin G Kemp

Warren D Grobman

Ted R White

William J Dauksher

Stanley Michael Filipiak

Wayne M Paulson

Jeffrey L Klein

Chong-Cheng Fu

T P Ong

Jonathan L Cobb

Kevin J Nordquist

Cesar M Garza

Chung-Peng Ho

Pawitter J S Mangat

Clyde H Browning

A photolithographic mask is adapted for use in imparting a pattern to a substrate. The pattern comprises a plurality of features. At least one of the plurality of features () is implemented in the mask as a phase shifting structure () with a unitary layer of opaque material () disposed thereon. The mask is utilized to impart the pattern to a layer over a semiconductor substrate.

Cr-capped chromeless phase lithography

A photomask and a method for making the same in which an opaque feature () is formed on a transparent substrate () and a depression () is etched in the transparent substrate () adjacent to the opaque feature (). The depression () is etched to a depth such that a phase difference between light passing through the substrate () outside the depression () and light passing through the depression is 180&#xb0;. In one embodiment, the depression () is formed in the substrate directly adjacent to an edge of the opaque feature (). In another embodiment, the depression () surrounds a mesa structure () formed in the substrate (), and the opaque feature () resides on the mesa structure (). The depression () may be laterally spaced from an edge of the opaque feature ().

Photomask having line end phase anchors

A semiconductor device is formed by patterning a resist layer using a rim phase shifting mask. A multilayer or single patterning layer to form the different phase-shifting regions and opaque regions is used to manufacture the rim phase shifting mask. First phase shifting regions are formed by transferring an opening in the multilayer or single patterning layer through an opaque layer and a transparent substrate. At least portions of the same multilayer or single patterning layer are used to recess the opaque layer a predetermined distance to form rims (second phase shifting regions). The first phase-shifting regions phase shift the light traveling through them 180 degrees relative to the light traveling through the rims, thereby increasing the contrast of the light traveling through the rim phase shifting mask.

Method of forming a rim phase shifting mask and using the rim phase shifting mask to form a semiconductor device

A resist layer ( ) on a semiconductor wafer ( ) is patterned by using a scanning exposure system ( ) which provides light, containing pattern information which is intended to be transferred to the wafer. The lithographic system is a step and scan system in which a reticle ( ) passes between a light source and a lens system( ). The wafer with the resist layer is passed through a focal plane of the patterned light at a tilt angle (&thgr;). The user selects a desirable range for the depth of the resist to be exposed at the focus of the patterned light. The tilt angle is calculated by taking the arc tangent of the desirable range divided by a width of a slit region ( ) of the projected light. The depth of focus increases over standard step and scan techniques.

Method for patterning resist

Integrated circuit designs are continually shrinking in size. Lithographic processes are used to transfer these designs to a semiconductor substrate. These processes typically require that the exposure wavelength of light be shorter than the smallest dimension of the elements within the circuit design. When this is not the case, exposure energy such as light behaves more like a wave than a particle. Additionally, mask manufacturing, photoresist chemical diffusion, and etch effects cause pattern transfer distortions. The result is that circuit elements do not print as designed. To counter this effect the circuit designs themselves can be altered so that the final printed results better matches the initial desired design. The process of altering designs in this way is called Lithographic Proximity Correction (LPC). Square (142), cross (162), octagon (172), and hammerhead (202) serifs are added to integrated circuit designs by shape manipulation functions to perform two dimensional (2-D) LPC.

Two dimensional lithographic proximity correction using DRC shape

Antireflective layers (54, 86, and 109) have been developed that have discrete portions (541, 542, 861, 862, 863, 1091, and 1092). The discrete portions (541, 542, 861, 862, 863, 1091, and 1092) allow the antireflective layers (54, 86, and 109) to be used in many instances where using a single layer of uniform composition would be difficult or impossible. Alternatively, a single antireflective layer with a continuously graded composition can be used.

Process for forming a semiconductor device with an antireflective layer

Integrated circuit designs are continually shrinking in size. Lithographic processes are used to pattern these designs onto a semiconductor substrate. These processes typically require that the wavelength of exposure used during printing be significantly shorter than the smallest dimension of the elements within the circuit design. When this is not the case, the exposure radiation behaves more like a wave than a particle. Additionally, mask manufacturing, photoresist chemical diffusion and etch effects cause pattern transfer distortions. The result is that circuit elements do not print as designed. To counter this effect the designs themselves can be altered so that the final printed results better match the initial desired design. The process of altering designs in this way is called Lithographic Proximity Correction (LPC). Edge assist shapes and edge biasing features are added to integrated circuit designs by shape manipulation functions to perform one dimensional (1-D) LPC.

One dimensional lithographic proximity correction using DRC shape

A process for designing and forming a reticle (40) as well as the manufacture of a semiconductor substrate (50) using that reticle (40). The present invention places outriggers (32, 34, 36) between features (30) in both dense and semi-dense feature patterns to assist in the patterning of device features. The width of the outriggers can be changed based on pitch and location between features in a semi-dense or dense feature pattern. In one embodiment, the outriggers can be manually or automatically inserted into the layout file after the locations of the attenuating features have been determined. The outriggers are not patterned on the substrate, but assist in forming resist features of uniform width.

Methods of designing a reticle and forming a semiconductor device

Reflective notching of a photoresist pattern (20), generated over reflective materials on a semiconductor substrate (12), is minimized by using an anti-reflective layer (20) of silicon-rich silicon nitride. The layer of silicon-rich silicon nitride is formed over the reflective materials and a layer of photoresist is then formed over the silicon-rich silicon nitride. The photoresist layer is then photolithographically patterned to form an integrated circuit pattern (20). The silicon-rich silicon nitride layer has an absorptive index of greater than 0.25, which allows it to be used as an anti-reflective layer with photolithographic patterning systems having ultraviolet and deep ultraviolet exposure wavelengths.

Method for forming an integrated circuit pattern on a semiconductor

Method and structure for forming an integrated circuit pattern on a

A contact is formed in a semiconductor device (10), independent of underlying topography or pitch. In one method of the present invention, an insulating layer (18) is deposited over a semiconductor substrate (12). An etch stop layer (20) is deposited over the insulating layer. A frame structure (22) is formed on the etch stop material and defines at least one contact region (23 and/or 25) within which the etch stop material is exposed. The exposed portions of the etch stop material are removed from the contact region to expose a portion of the insulating layer. The exposed portion of the insulating layer is then anisotropically etched and at least one contact (30 and/or 32) is formed in the contact region. Depending on where the contact region is positioned, either a self-aligned contact or a non-self-aligned contact may be formed, or both types of contacts may be formed simultaneously.

Method for forming contact to a semiconductor device

A conductive plug (46) is formed in a semiconductor device (30) by using an aluminum nitride glue layer (42). The glue layer is deposited on an interlayer dielectric (40) prior to forming a contact opening (44), such that the glue layer does not line the opening sidewalls or bottom. Tungsten or other plug material is then deposited in the opening and on the glue layer and subsequently polished or etched back to form the plug. The remaining portions of the glue layer may be left within the device or removed as deemed appropriate.

Method for forming a plug and semiconductor device having the same

An anti-reflective coating (ARC) (20) is formed over a reflective, conductive layer (18), such as polysilicon or aluminum, in a semiconductor device (10). The ARC is an aluminum nitride layer. During photolithography, the ARC absorbs radiation waves (30), particularly absorbing wavelengths under 300 nanometers, such as deep ultraviolet (DUV) radiation at 248 nanometers. Being absorbed by the ARC, the radiation waves are prevented from reflecting off the underlying conductive layer. Thus, resist mask (34) is patterned and developed true to the pattern on lithography mask (24), resulting in accurate replication into appropriate layers of the device.

Method for making a semiconductor device having anti-reflective coating

Integrated circuits with small feature sizes are obtained using a phase shifting mask which has reduced back reflection and improved optical contrast. These improvements result from reduced etching of the chrome and chrome oxide layers on the phase shifting mask. In one embodiment, the phase shifting mask is formed by depositing an image reversible photoresist layer (22) which overlies the optical mask (18). Forming a first exposed region (24) and an unexposed region (26) in the image reversible photoresist layer (22). Treating the first exposed region (24) to form a hardened first exposed region. Forming a second exposed region (30) within the remaining portion of the unexposed region (26) by exposing the back surface (16) of the substrate (12) to an optical illumination source. Removing the second exposed region (30) to uncover a portion (32) of the substrate (12) and to form an etch mask (34). The uncovered portion (32) of the substrate (12) is etched to form a trench region (38).

Growing community of inventors

Austin, TX, United States of America

Bernard J Roman