Commissariat a L'energie Atomique

Commissariat a L'energie Atomique Et Aux Energies Alternatives

Commissariat À L'énergie Atomique Et Aux Énergies Alternatives

Freescale Semiconductor,inc.

Other

Thales

Bernard Diem

Philippe Robert

Laurent Clavelier

Vincent Larrey

Bishnu Prasanna Gogoi

Jean Dijon

Emmanuel Defay

Francois Perruchot

Gilles Delapierre

Guillaume Jourdan

Francois De Crecy

Xavier Baillin

Patrice Rey

Jean-Yves Laurent

Henri Sibuet

Stéphane Caplet

Marie-Therese Delaye

Jean-Philippe Polizzi

François Perruchot

Thierry Hilt

Thierry Leroux

Jean-Sébastien Danel

Arnaud Walther

Angel Zhivkov Kirchev

Hubert Grange

Jérôme Willemin

Michel Borel

Olivier Lefort

Andre Chenevas-Paule

Christine Ferrandon

Pascal Schott

Andre Rouzaud

France Michel

Elisabeth Orsier

Patricia Touret

H&eacute;l&egrave;ne Wehbe-Alause

Sylvie Viollet Bosson

Marie-Thérèse Delaye

Eugene Blanchet

Sylvie Viollet-Bosson

Florence Mattera

Philippe Baclet

André Rouzaud

Hélène Whebe-Alause

A pressure sensor to measure low pressures, including: a body extending in a plane, the body including a measurement zone situated at an end of the body, a connection zone situated at another end of the body, the measurement zone including a cavity delimited by a wall, that is deformable under effect of a difference in pressure between inside of the cavity and an external environment, the deformable wall situated at rest in a plane parallel to the plane of the sensor; a mechanism measuring deformation of the deformable wall, the measurement mechanism situated in the cavity; an electrical connection connecting the measurement mechanism to the connection zone, the electrical connection arranged in the body.

Pressure sensor suited to measuring pressure in an aggressive environment

An electrical connector allowing a connection between two substantially facing electrical contacts respectively pertaining to a housing and a support, and including a main body including a first end for secure connection thereof to the housing and a second end for secure connection thereof to the support, the main body being bent in at least one bending area.

Electrical connectors having a bent main body for electrical connection between a housing and a support, and being disposed as a grid array or network

The invention provides a method of fabricating an electromechanical structure presenting a first substrate including a layer of monocrystalline material covered in a sacrificial layer that presents a free surface, the structure presenting a mechanical reinforcing pillar in the sacrificial layer, the method including etching a well region in the sacrificial layer to define a mechanical pillar; depositing a first functionalization layer of the first material to at least partially fill the well region and cover the free surface of the sacrificial layer around the well region; depositing a second material different from the first material for terminating the filling of the well region to thereby cover the first functionalization layer around the well region, planarizing the filler layer, the pillar being formed by the superposition of the first material and second material in the well region; and releasing the electromechanical structure by removing at least partially the sacrificial layer.

Method of fabricating an electromechanical structure including at least one mechanical reinforcing pillar

A measuring circuit for a multisensory detector is provided, including a plurality of detection branches mounted in parallel, with each detection branch of said plurality of detection branches including at least two dipoles mounted in series, and at least one reference branch, including a polarizing source and another at least two dipoles mounted in series, with the reference branch being connected in parallel to at least two detection branches among the plurality of detection branches, so as to form a Wheatstone bridge with each one of the detection branches among the plurality of detection branches.

Multisensory detector

MEMS and/or NEMS differential pressure measurement sensor comprising at least one first membrane and at least one second membrane, each suspended from a substrate, the first membrane having a face subjected to a reference pressure and a second face subjected to a first pressure to be detected, the second membrane having a first face subjected to the reference pressure and a second face subjected to a second pressure to be detected, a rigid beam of longitudinal axis articulated with respect to the substrate by a pivot link around an axis, said beam being solidly connected by a first zone to the first membrane and by a second zone to the second membrane such that the pivot link is situated between the first zone and the second zone of the beam, a sensor of measuring the movement of the beam around the axis, said sensor being arranged at least in part on the substrate.

Microelectromechanical and/or nanoelectromechanical differential pressure measurement sensor

A microdevice encapsulation structure arranged in at least one cavity formed between a substrate and a cap rigidly attached to the substrate is provided, the cap including one layer of a first material, one face of which forms an inner wall of the cavity, and mechanical reinforcement portions rigidly attached at least to and partly covering said face, having gas absorption and/or adsorption properties, in which the Young's modulus of a second material of the mechanical reinforcement portions is higher than that of the first material, wherein each of said portions includes at least one first layer of the second material, and at least one second layer of a third metallic getter material such that the first layer of the second material is arranged between the layer of the first material and the second layer of the third material and/or is covered by the second layer of the third material.

Encapsulation structure including a mechanically reinforced cap and with a getter effect

Gyrometer including a substrate and an inertial mass suspended above the substrate, the inertial mass including an excitation part and a detection part, means of moving the excitation part is movable in at least one direction contained in the plane of the inertial mass, and capacitive detection device detecting movement of the detection part outside the plane of the mass. The capacitive detection device includes comprising at least one suspended electrode, located above the detection part located facing the substrate so as to form a variable capacitor with the detection part, the electrode being held above the detection part by at least one pillar passing through the inertial mass.

Gyrometer with reduced parasitic capacitances

A method for etching a desired complex pattern in a first face of a substrate, including: simultaneous etching of at least a first and a second sub-pattern through the first face of the substrate, the etched sub-patterns being separated by at least one separating wall, a width of the first sub-pattern being greater than a width of the second sub-pattern at the first face, and a depth of the first sub-pattern being greater than a depth of the second sub-pattern in a direction perpendicular to the said first face; and removing or eliminating the separating wall to expose the desired complex pattern.

Method for etching a complex pattern

A micromachined electromechanical (MEMS) actuator including, for example, an electrostatically actuated electrical switch, is provided, including a first set of conducting plates forming part of the movable element of the switch, interdigitated with a set of conducting plates forming part of the substrate. The plates are, in principle, vertical relative to the surface of the substrate; they are in partial heightwise overlap and a control voltage applied between the two sets of plates exerts a vertical force acting so as to move the movable element closer to the substrate. The conducting plates of the movable element are connected to one another by conducting end crosspieces connecting the ends of these plates so as to surround, laterally, the stationary conducting plates. The distance separating one stationary plate end from the mobile crosspiece is the same at both ends so that the forces exerted in the elongation direction of the plates cancel out. This distance is preferably the same for all the plates.

Electromechanical actuator with interdigitated electrodes

A process for closure of at least one cavity intended to encapsulate or be part of a microelectronic device, comprising the following steps:

Cavity closure process for at least one microelectronic device

The invention relates to a method of fabricating an electromechanical device including an active element, wherein the method comprises the following steps: a) making a monocrystalline first stop layer on a monocrystalline layer of a first substrate; b) growing a monocrystalline mechanical layer epitaxially on said first stop layer out of at least one material that is different from that of the stop layer; c) making a sacrificial layer on said active layer out of a material that is suitable for being etched selectively relative to said mechanical layer; d) making a bonding layer on the sacrificial layer; e) bonding a second substrate on the bonding layer; and f) eliminating the first substrate and the stop layer to reveal the surface of the mechanical layer opposite from the sacrificial layer, the active element being made by at least a portion of the mechanical layer.

Method of fabricating an electromechanical device including at least one active element

A microsystem, and more particularly a microgyrometer, includes at least two mechanically coupled oscillating masses. The microsystem is achieved in a flat substrate. The oscillating masses are connected to the substrate by suspension springs. The oscillating masses are coupled together by a rigid coupling bar so as to produce an anti-phase movement of the oscillating masses when driven by an excitation device in a predefined excitation direction. The coupling bar is connected to intermediate zones of the corresponding suspension springs. The suspension springs are arranged on opposite sides of the oscillating masses. An intermediate zone is arranged between a first end of a suspension spring, which is fixed to the corresponding oscillating mass, and a second end of the suspension spring, which is fixed to the substrate by a corresponding anchoring point.

Microsystem, and more particularly a microgyrometer, includes at least two mechanically coupled oscillating masses

The invention relates to a method of making a component from a heterogeneous substrate comprising first and second portions in at least one monocrystalline material, and a sacrificial layer constituted by at least one stack of at least one layer of monocrystalline Si situated between two layers of monocrystalline SiGe, the stack being disposed between said first and second portions of monocrystalline material, wherein the method consists in etching said stack by making:

Heterogeneous substrate including a sacrificial layer, and a method of fabricating it

The invention provides a method of fabricating and electromechanical device having an active element on at least one substrate, the method having the steps of: a) making a heterogeneous substrate having a first portion, an interface layer, and a second portion, the first portion including one or more buried zones sandwiched between first and second regions formed in a first monocrystalline material, the first region extending to the surface of the first portion, and the second region extending to the interface layer, at least one said buried zone being made at least in part out of a second monocrystalline material so as to make it selectively attackable relative to the first and second regions; b) making openings from the surface of the first portion and through the first region, which openings open out to at least one said buried zone; and c) etching at least part of at least one buried zone to form at least one cavity so as to define at least one active element that is at least a portion of the second region between said cavity and said interface layer; wherein the first and second portions of the substrate are constituted respectively from first and second substrates that are assembled together by bonding, at least one of them including at least one said interface layer over at least a fraction of its surface.

Method of fabricating a MEMS/NEMS electromechanical component

The invention relates to inter-level realignment after a stage of epitaxy on a face () of a substrate (), comprising the production of at least one initial guide mark () on the face of the substrate, this initial guide mark being designed so as to be transferred, during epitaxy, onto the surface of the epitaxied layer (). The initial guide mark () is produced in such a way that, during epitaxy, its edges create growth defects that propagate as far as the surface of the epitaxied layer () to provide a transferred guide mark () on the surface of the epitaxied layer () reproducing the shape of the initial guide mark () and in alignment with the initial guide mark.

Level realignment following an epitaxy step

Growing community of inventors

Echirolles, France

Bernard Diem