Semes Co., Ltd.

Beomjeong Oh

Chulwoo Kim

Dae Sung Kim

Jae-Youl Kim

Sanguk Son

Jeeyong Jung

Young Ho Seo

Sanghwa Lee

Kwangbok Jun

Jong Nam Na

Hyungoo Kwon

Provided is a substrate processing apparatus control system and substrate processing apparatus control method, the substrate processing apparatus control system including an image generator for generating an image to be printed by a substrate processing apparatus including an inkjet head unit to print the image on a substrate in an inkjet printing manner, a jetting driver for receiving an image signal from the image generator and outputting a jetting signal to the inkjet head unit to allow the substrate processing apparatus to print the image on the substrate based on the image signal, and a motion controller for controlling operation of a stage unit for supporting and moving the substrate in the substrate processing apparatus.

Substrate processing apparatus control system and substrate processing apparatus control method

In a printing method using an ink jet head, a chemical liquid may be discharged onto a substrate from a plurality of nozzles of the ink jet head. Discharging numbers of the chemical liquid from the plurality of nozzles may be identified and a cumulative discharging number of the chemical liquid from the plurality of nozzles may be calculated. The cumulative discharging number of the chemical liquid may be compared with a previously set limit discharging number of the ink jet head. A replacement time of the ink jet head may be determined if the cumulative discharging number of the chemical liquid exceeds the previously set limit discharging number.

Method of maintaining an ink jet head and printing method using an ink jet head

An apparatus for discharging chemical liquid may include an ink jet head, a gantry and a control member. The ink jet head may include a plurality of nozzles capable of discharging chemical liquid onto a substrate. The gantry may hold the ink jet head to place the ink jet head over the substrate. The control member may control the ink jet head such that discharge times of the chemical liquid from the nozzles of the ink jet head may be changed.

Apparatus for discharging chemical liquid and method of discharging chemical liquid

An apparatus for supplying chemical liquid may include a chemical liquid discharging member, a reservoir, a chemical liquid supplying member and a chemical liquid circulating member. The chemical liquid discharging member may discharge a chemical liquid onto a substrate. The reservoir may store the chemical liquid supplied to the chemical liquid discharging member. The chemical liquid supplying member may supply the chemical liquid stored in the reservoir. The chemical liquid circulating member may circulate the chemical liquid from the chemical liquid discharging member to the reservoir.

Apparatus for supplying chemical liquid

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Cheonan-si, South Korea

Beomjeong Oh