Skhynix Inc.

Beom Ho Mun

Eun Jeong Kim

Jong Kook Park

Seung Mi Lee

Ji Won Choi

Yun Hyuck Ji

Kyoung Tak Kim

A semiconductor device includes: a semiconductor device, comprising: a bit line structure including a bit line contact plug, a bit line, and a bit line hard mask that are sequentially stacked over a substrate; a storage node contact plug that is spaced apart from the bit line structure; a conformal spacer that is positioned between the bit line and the storage node contact plug and includes a low-k material; and a seed liner that is positioned between the conformal spacer and the bit line and thinner than the conformal spacer.

Growing community of inventors

Gyeonggi-do, South Korea

Beom Ho Mun