Zhejiang Sci-tech University

Benyong Chen

Liping Yan

Jiandong Xie

Shihua Zhang

Enzheng Zhang

Yingtian Lou

Zhengrong Sun

Bin Xu

Qiuhong Tian

A variable synthetic wavelength absolute distance measuring device locked to a dynamic sideband and a method thereof are disclosed. A high-frequency electro-optic phase modulator driven by an adjustable clock source to modulate a single-frequency reference laser to generate laser sidebands with equal frequency intervals. The tunable laser is locked to the fifth-order sideband through an offset frequency locking technology. After locking, the interval frequency of the sideband is determined by the adjustable clock source, namely dynamic sideband. The frequency of the adjustable clock source is dynamically adjusted, the interval frequency of the sideband and the frequency difference between the two lasers will change accordingly. Combined with the multi-wavelength interferometry, the constructed synthetic wavelength is also determined by the adjustable clock source, that is, the variable synthetic wavelength. The variable synthetic wavelength is dynamically adjusted, and the multi-level second-level synthetic wavelength is continuously constructed from large level to small level.

Variable synthetic wavelength absolute distance measuring device locked to dynamic sideband and method thereof

The disclosure discloses a differential sinusoidal phase modulation laser interferometric nanometer displacement measuring apparatus and method. The beam output from the single-frequency laser is converted into a 45&#xb0; linearly polarized beam after passing through the polarizer, then projected onto two sets of sinusoidal phase modulation interferometers consisting of the beam splitter, the electro-optic phase modulator, the half wave plate, three pyramid prisms, two polarization beam splitters, thereby forming measurement and reference interference signals which are received by two photodetectors. A high-frequency sinusoidal voltage signal is applied to the electro-optic phase modulator placed in the common reference arm of the two interferometers, thereby modulating the interference signal into a high-frequency AC signal. By detecting the difference between the phase change amounts of the two interference signals when the measured object moves, the measured displacement can be obtained.

Differential sinusoidal phase modulation laser interferometric nanometer displacement measuring apparatus and method

A reference laser beam locked to a femtosecond optical frequency comb is modulated through a high frequency electro-optic phase modulator, and laser sidebands with equal intervals are generated. Beat frequency is performed on the sixth-order sideband and the frequency sweeping laser beam, a beat signal and a frequency sweeping signal source are down-mixed to generate a difference frequency signal, and the difference frequency signal is locked to a reference clock through a digital phase detector and a PID controller. The frequency sweeping laser beam is locked to reference laser beam with a dynamic offset frequency under the closed loop control, and sinusoidal frequency sweeping is simultaneously performed together with the frequency sweeping signal source. The locked laser beam is used for absolute distance measurement, and a distance to be measured is obtained according to the synthetic wavelength transition theory.

Sinusoidal frequency sweeping interferometric absolute distance measurement apparatus and method with dynamic offset frequency locking

The disclosure discloses a phase delay extraction and compensation method in a PGC phase demodulation technology. The sinusoidal phase modulation interference signal is converted into a digital interference signal by an analog-to-digital converter after amplification and filtering, and the digital interference signal is subjected to orthogonal downmixing of first-order, second-order, and fourth-order harmonics simultaneously to obtain three pairs of orthogonal harmonic amplitude signals. The three pairs of orthogonal harmonic amplitude signals are used to extract phase delay, and the result is used to calculate the corresponding phase delay correction coefficients, and the phase delay correction coefficient are multiplied by the corresponding absolute harmonic amplitude signal equal to the sum of the absolute value of the orthogonal harmonic amplitude signals to obtain a new harmonic amplitude signal that is not affected by the phase delay, then the phase to be measured is obtained through the arc tangent operation.

Phase delay extraction and compensation method in PGC phase demodulation technology

The present invention discloses a real-time normalization apparatus and method of the PGC demodulation in a sinusoidal phase modulation interferometer. An optical setup containing a measuring interferometer and a monitoring interferometer is constructed. An electro-optic phase modulator is placed in the common reference arm of the two interferometers. High-frequency sinusoidal wave modulation and low-frequency triangular wave modulation are applied to the electro-optic phase modulator at the same time. Sinusoidal modulation is used for generating phase carrier, and PGC demodulation is performed to obtain quadrature signals containing the phase information to be measured. Triangular wave modulation makes the quadrature signals change periodically. Ellipse fitting is performed on the Lissajous figure corresponding to the quadrature signals, and real-time normalization of the PGC demodulated quadrature signals is achieved. By calculating the variation of the phase difference between the two interference signals, the measured displacement is obtained, and nanometer scale displacement measurement is achieved.

Real-time normalization apparatus and method of phase generated carrier demodulation in sinusoidal phase modulation interferometer

The present invention discloses a dual-homodyne laser interferometric nanometer displacement measuring apparatus and method based on phase modulation. The linearly polarized beam with single wavelength emitted from a single frequency laser is projected onto a dual-homodyne laser interferometer consisting of four beam splitters and two retroreflectors to respectively form a measurement interference signal and a reference interference signal received by two photodetectors, respectively; an electro-optic phase modulator is placed in the optical path and a periodic sawtooth-wave voltage signal is applied to modulate the measurement and reference DC interference signals into AC interference signals; the measured displacement is obtained by detecting the variation of the phase difference between the two interference signals caused by the movement of the measured object. The present invention overcomes the error arising from DC drift in the homodyne laser interferometer and avoids the sinusoidal error caused by the direct subdivision of the interference signal or non-quadrature error of measurement interference signal. The present invention is applicable for the precision displacement measurement with sub-nanometer level accuracy in the fields of high-end equipment manufacturing and processing.

Dual-homodyne laser interferometric nanometer displacement measuring apparatus and method based on phase modulation

A method of air refractive index correction for an absolute long distance measurement adopting a two-color method based on a single wavelength and a synthetic wavelength is provided. Two lasers emit two laser beams with a constant single wavelength and a variable wavelength, respectively, to form a synthetic wavelength chain from large to small through a laser interferometric system. Each order of the synthetic wavelength chain is used to obtain a series of the estimate values of optical distance with gradually increasing accuracy. After optical distances corresponding to a minimum synthetic wavelength and a single wavelength are obtained simultaneously, the corrected absolute distance is achieved according to the principle of the two-color method for air refractive index correction. The method can realize full-path correction of air refractive index along the actual path of the distance measurement, and has low requirements on the measurement precision of environmental parameters such as temperature and pressure.

Method of air refractive index correction for absolute long distance measurement

A laser heterodyne interferometric straightness measurement apparatus and method with six DOFs determination includes a part for determining the straightness and its position based on laser heterodyne interferometry and a part for error determination and compensation. The optical path for determination of four DOFs errors including three common beam-splitters, a polarizing beam-splitter, a planar mirror, a convex lens, a position-sensitive detector and two quadrant detectors is added in the optical configuration of the part for determining the straightness and its position based on laser heterodyne interferometry.

Laser heterodyne interferometric straightness measurement apparatus and method with six DOFs determination

An absolute distance measurement apparatus and method using laser interferometric wavelength leverage includes a light source system, a wavelength-leverage laser interferometric system and an interference signal processing and controlling system. The light source system outputs a orthogonally linearly polarized beam with the wavelength &#x3bb;and the wavelength &#x3bb;. The orthogonally linearly polarized beam projects onto the wavelength-leverage laser interferometric system to form the interference beam. The interference beam projects onto the interference signal processing and controlling system. In the wavelength-leverage laser interferometric system, the synthetic wavelength and the single wavelength as well as the measured absolute distance and the moving displacement of the cube-corner prism in the reference arm form a wavelength-leverage absolute distance measurement relationship.

Absolute distance measurement apparatus and method using laser interferometric wavelength leverage

The present invention discloses a processing method for laser heterodyne interferometric signal based on locking edge with high frequency digital signal. A reference signal and a measurement signal of heterodyne interferometer, after being processed by photodetector, signal amplifier, filtering circuit, voltage comparator and high frequency digital edge locking module, are transferred to pulse counting synchronized latching processing module, to obtain entire cycle interference fringe numbers and filling pulse numbers in one interference fringe cycle, of the reference signal and the measurement signal; the numbers are transferred to a computer to obtain displacement and speed of a measured object; usage of a high frequency digital pulse signal to lock the rising edge of laser heterodyne interferometric signal can improve the gradient of the rising edge of interference signal and eliminate wrong pulse caused by noises, and improve the accuracy and stability of the processing for the following signals.

Laser heterodyne interferometric signal processing method based on locking edge with high frequency digital signal

Measuring refractive index of air based on laser synthetic wavelength interferometry. The Apparatus includes a dual-frequency laser that emits orthogonal linear polarized light of wavelengths &#x3bb;and &#x3bb;, a beamsplitter, two polarizing beamsplitters, two corner-cube retroreflectors, a quartz vacuum cavity of length L disposed in the measuring optical path in parallel to the light propagation direction, and two detectors. The apparatus is used to measure the refractive index of air using the dual-frequency laser to emit orthogonal linear polarized light with wavelengths &#x3bb;and &#x3bb;, using the beamsplitters, corner-cube retroreflectors, quartz vacuum cavity, and detectors. The integer N and fraction &#x3b5; of interference fringes of wavelength &#x3bb;are determined. The refractive index of air n is obtained by using the length L of the vacuum cavity, integer N and fraction &#x3b5; of the interference fringes of wavelength &#x3bb;. The measurement is accurate up to 10or higher, and has strong anti-disturbance ability to the environment.

Growing community of inventors

Zhejiang, China

Benyong Chen