Fei Comapny

Benoit Recur

Adrian Paul Sheppard

Andrew M Kingston

Shane Jamie Latham

Trond Karsten Varslot

Glenn Robert Myers

Heyang Li

Shane Latham

Trond Varslot

Glenn Myers

Andrew Kingston

A method of investigating a specimen using a tomographic imaging apparatus comprising:

Acquisition and processing of data in a tomographic imaging apparatus

A method of investigating a specimen using a tomographic imaging apparatus using a stage for producing relative motion of a source with respect to a specimen, so as to allow the source and a detector to image the specimen along a series of different viewing axes and a processing apparatus for assembling a tomographic image of at least part of the specimen. The investigation is carried out by considering a virtual reference surface that surrounds the specimen and is substantially centered thereon, considering an incoming point of intersection of each of said viewing axes with this reference surface, thereby generating a set of such intersection points corresponding to the series of viewing axes, choosing discrete viewing axes in the series so as to cause the set to comprise a two-dimensional lattice of points located areally on the reference surface in a substantially uniform distribution.

A method for investigating a specimen using a tomographic imaging apparatus, comprising acquiring a set of input images of the specimen taken at a corresponding set of source positions that are intended to lie on an ideal locus but are instead caused by positioning errors to lie on a distorted locus, using the images to construct an initial tomographic image, dissociating the initial tomographic image into a set of reference images referenced to said ideal locus, comparing the given input images to the corresponding reference images, calculating a set of transformations necessary to map the input images onto the reference images, and using the set of transformations to construct a modified tomographic image.

Positional error correction in a tomographic imaging apparatus

A method of investigating a specimen using a tomographic imaging apparatus, by performing, in multiple iterations, the following steps:

Growing community of inventors

Turner, Australia

Benoit Recur