Sunedison Semiconductor Limited (uen201334164h)

Globalwafers Co., Ltd.

Sunedison Semiconductor Limited

Benno Orschel

Mike Wolfram

Gang Wang

John Francis Valley

Arash Abedijaberi

Markus Jan Peter Siegert

Andrey Melnikov

Ellen Torack

A system for preventing an unsafe operation of a plurality of semiconductor wafer manufacturing machines communicatively coupled to a computing device. The system includes the computing device, which includes a processor coupled to a memory. The memory contains processor-executable instructions that, when executed, cause the computing device to perform the steps of storing, in the memory, a first state of a first machine of the plurality of machines, generating a first pending output to be issued to the first machine, determining whether an unsafe condition would result if the first pending output is issued to the first machine in the first state, issuing the first pending output upon determining that issuing the first pending output would not result in an unsafe condition, and blocking the first pending output from being issued upon determining that issuing the first pending output would result in an unsafe condition.

Methods and systems for preventing unsafe operations

A system for preventing an unsafe operation of at least one machine communicatively coupled to a computing device. The system includes the computing device which includes a processor coupled to a memory. The memory contains processor-executable instructions that, when executed, cause the computing device to perform the steps of storing, in the memory, a first state of a first machine of the at least one machine, generating a first pending output to be issued to the first machine, determining whether an unsafe condition would result if the first pending output is issued to the first machine in the first state, and issuing the first pending output upon determining that issuing the first pending output would not result in an unsafe condition and blocking the first pending output from being issued upon determining that issuing the first pending output would result in an unsafe condition.

A method performs phase shift interferometry to detect irregularities of a surface of a wafer after the wafer has been placed into an interferometer and while the wafer is vibrating. Additionally, a system and a non-transitory computer-readable storage medium have computer-executable instructions embodied thereon for performing phase shift interferometry to detect irregularities of a surface of a wafer after the wafer has been placed into an interferometer and while the wafer is vibrating.

Systems and methods for performing phase shift interferometry while a wafer is vibrating

A method for controlling temperatures in an epitaxial reactor for use in a wafer-production process is provided. The method is implemented by a computing device coupled to a memory. The method includes transmitting, to a heating device in a first zone of the epitaxial reactor, an output power instruction representing a base output power. The method additionally includes determining an actual time period for a temperature in the first zone of the epitaxial reactor to reach a target temperature, determining a difference between the actual time period and a reference time period, determining an output power offset based on the difference, and storing the output power offset in the memory in association with the heating device.

Systems and methods for controlling temperatures in an epitaxial reactor

A method and system for computerized coordination of multiple operations to be performed by components of machines are provided. The computer system includes a memory device for storing data and a computer-controlled machine that includes a processor in communication with the memory device wherein the processor is programmed to read a recipe file from the memory device, the recipe file including operating parameter values for controlling the operation of the machine, extract a name of a meta-recipe file from the recipe file, the meta-recipe file including a first portion including parameter properties of operating parameter values used by the meta-recipe file, receive values for the meta-recipe having the parameter properties specified in the first portion, and operate the machine using code from a second portion of the meta-recipe and the received values.

Method and system for a meta-recipe control software architecture

A computing device is configured to execute a first instance of a single-threaded script engine in a first thread associated with a first execution context, wherein the first instance of the single-threaded script engine accesses at least one shared script object through a first reference counted script base value object. The computing device is also configured to concurrently execute a second instance of the single-threaded script engine in a second thread_associated with a second execution context, wherein the second instance of the single-threaded script engine accesses the at least one shared script object through a second reference counted script base value object. The script engine does not switch between the execution contexts.

Methods and systems for deterministic and multithreaded script objects and script engine

A method for measuring phase shift to detect irregularities of a surface is described. Additionally, a system for measuring phase shift to detect irregularities of a surface is provided. Further, a non-transitory computer-readable storage medium having computer-executable instructions embodied thereon is described. The computer-executable instructions are for measuring phase shift to detect irregularities of a surface.

Systems and methods for interferometric phase measurement

A method and data-logging system are provided. The system includes a map-ahead thread configured to acquire blocks of private memory for storing data to be logged, the blocks of private memory being twice as large as the file page size, a master thread configured to write data to the blocks of private memory, in real-time and in full resolution, the data acquired during operation of a machine generating the data and written to the blocks of private memory in real-time, the machine including a controller including a processor communicatively coupled to a memory having processor instructions therein, and a write-behind thread configured to acquire pages of memory that are mapped to pages in a file, copy the data from the blocks of private memory to the acquired file-mapped blocks of memory.

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St. Louis, MO, United States of America

Benno Orschel