Nikon Metrology Nv

Bennie Smit

Alexander Charles Wilson

There is provided a method of setting a filament demand in an x-ray apparatus. The x-ray apparatus has a filament, through which the passing of a heating current allows thermionic emission of electrons from the filament. The x-ray apparatus has a target, arranged to generate x-rays from the electrons emitted from the filament. The x-ray apparatus has a detector, arranged to detect x-rays generated by the target for forming an x-ray image. The x-ray apparatus has a controller configured to perform a measurement operation of the x-ray apparatus. The measurement measures a parameter of the x-ray apparatus. The controller is configured to set a filament demand for the filament. The filament demand correlates with the current passed through the filament. The method comprises varying the filament demand between a first value corresponding to a lower filament current and a second value corresponding to a higher filament current. The method comprises measuring the parameter at a series of values of the filament demand between the first value and the second value. The method comprises detecting a knee in the measured parameter. The method comprises determining the filament demand corresponding to the detected knee in the parameter. The method comprises setting the filament demand for the x-ray apparatus based on the determined filament demand corresponding to the detected knee in the parameter.

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Hertfordshire, United Kingdom

Bennie Smit