Boston University

Saudi Arabian Oil Company

United States of America As Represented by the Secretary of the Air Force

Aramco Services Company

Bennett B Goldberg

M Selim Unlu

Michael F Ruane

David A Bergstein

Thomas Gary Bifano

Selim M Unlu

Abdulkadir Yurt

Euan Ramsay

Stephen Ippolito

Mazen Kanj

Shannon Lee Eichmann

M Selim Ünlü

Jerome Charles Mertz

Ajay Joshi

Ronen Adato

Hari Prasad Paudel

Yang Lu

Christopher Stockbridge

William Shain

Selim M Ünlü

Anna Swan

Lev Moiseev

Yusuf Leblebici

Samuel Lipolf

Yunjie Tong

Hadi F Ghaemi

Fatih Hakan Koklu

This disclosure provides methods and devices for the label-free detection of target molecules of interest. The principles of the disclosure are particularly applicable to the detection of biological molecules (e.g., DNA, RNA, and protein) using standard SiO-based microarray technology.

Structured substrates for optical surface profiling

A device testing approach employs optical antennas at test locations of a semiconductor device, usable as either/both radiators or receivers. As a radiator, an antenna responds to localized optical energy at a test location of the device to generate corresponding radiated optical energy that can be sensed and processed by a test system. As a receiver, an antenna receives radiated optical energy as generated by a test system and converts the energy into corresponding localized optical energy for affecting operation of the device. The optical antennas may be formed from metal segments on the same metal layers used for signal interconnections in the device, and thus the disclosed approach can provide enhanced test functionality without burdening the device manufacturing process with additional complexity solely to support testing. The testing approach may be used in different modalities in which the antennas variably act as transmitters, receivers, and reflectors/refractors.

Optical antennas for advanced integrated circuit testing

Optical verification testing of an IC includes obtaining images of the IC by, for each image: (i) illuminating the IC with excitation light, wherein the excitation light corresponds to a respective specific optical excitation of a predefined spectrum of optical excitations (e.g., wavelength spectrum); and (ii) detecting scattered light from the IC in response to the specific optical excitation. For each of a set of sub-regions of the images, the respective sub-region is mapped to at least one of (i) a specific sub-unit of a predefined set of sub-units (e.g., gates) of the IC and (ii) a null result, thereby creating a representation of a detected layout of the IC as an arrangement of the sub-units. The representation can be used to verify that an as-fabricated layout is consistent with an as-designed layout, to detect unauthorized modifications of the IC structure.

Gate-level mapping of integrated circuits using multi-spectral imaging

A system and method for correction of aberrations in a solid immersion microscopy system using a deformable mirror. A solid immersion lens is provided having a surface configured to make optical contact with a nearly planar surface of a substrate, an object to be imaged disposed on the opposite side of the substrate. A convex surface of the solid immersion lens faces an objective lens. A deformable mirror assembly, including a plurality of individually controllable actuators, receives light transmitted from the object. A control system controls in communication with the deformable mirror assembly provides individual actuation of each of the actuators of the deformable mirror to compensate or counteract the effects of aberrations.

Solid immersion microscopy system with deformable mirror for correction of aberrations

Embodiments of the invention provide an imaging system and method using adaptive optics and optimization algorithms for imaging through highly scattering media in oil reservoir applications and lab-based petroleum research. Two-/multi-photon fluorescence microscopy is used in conjunction with adaptive optics for enhanced imaging and detection capabilities in scattering reservoir media. Advanced fluorescence techniques are used to allow for super-penetration imaging to compensate for aberrations both in and out of the field of interest, extending the depth at which pore geometry can be imaged within a rock matrix beyond the current capability of confocal microscopy. The placement of a Deformable Mirror or Spatial Light Modulator for this application, in which scattering and index mismatch are dominant aberrations, is in an optical plane that is conjugate to the pupil plane of the objective lens in the imaging system.

Adaptive optics for imaging through highly scattering media in oil reservoir applications

A dual-phase interferometric method and device for charge modulation mapping in integrated circuits provides significant improvement in signal to noise ratio over conventional detection configurations. The method and device can be used for failure analysis and testing of advanced technology IC chips for which high sensitivity in modulation mapping is required.

Dual-phase interferometry for charge modulation mapping in ICS

An assay system having a channel bounded by first and second reflective surfaces adapted to accommodate a fluid material therebetween and defining a plurality of regions in an array between those surfaces with each region defining a resonant cavity and adapted to receive a capturing material on a surface thereof whereby a source of radiation illuminates each region to provide a standing wave of radiation of within the cavity indicative of binding of said capturing agent to material under investigation, a binding thereof being detected in response to radiation from each cavity indicative of a change in the standing wave pattern.

Resonant cavity biosensor

A method and apparatus for performing optical microscopy in one to three dimensions employs a spectral self-interference fluorescent microscopy technique that includes providing at least one fluorescent microscopy sample, at least one objective lens, and at least one reflecting surface. The fluorescent sample is disposed between the objective lens and the reflecting surface, the distance from the sample to the reflecting surface being several to several tens times an excitation wavelength. Excitation light causes the fluorescent sample to emit light, at least a portion of which is reflected by the reflecting surface. The objective lens collects the reflected light and the light emitted directly by the fluorescent sample. The direct and reflected light interfere causing spectral oscillations in the emission spectrum. The periodicity and the peak wavelengths of the emission spectrum are spectroscopically analyzed to determine the optical path length between the fluorescent sample and the reflecting surface.

Spectral imaging for vertical sectioning

A viewing enhancement lens ( -NAIL) which functions to increase the numerical aperture or light gathering or focusing power of viewing optics such as a microscope ( ) used to view structure within a substrate such as a semiconductor wafer or chip or of imaging optics such as media recorders. The result is to increase the resolution of the system by a factor of between n, and n , where n is the index of retraction of the lens substrate.

Numerical aperature increasing lens (nail) techniques for high-resolution sub-surface imaging

A near-field optical microscope is provided having a tip or tapered optical fiber light guide mounted directly in a hole drilled in the center of a microlens which itself is mounted in a piezoelectric tube for dithering. The tip of the tapered fiber is positioned at the front focal point of the lens. Light emanating from the region just about the tip is thus collected and collimated by the lens. A second lens, further down the optical path next focuses the beam into another fiber for transmission to a photon detection and/or spectroscopic apparatus. This second fiber can alternatively be replaced by one or more image processing lenses or a coherent fiber bundle with the light being transmitted to a position sensitive detector to provide a direct image of the tip region. The microscope also includes a shear force dithering apparatus for control of fiber tip to sample distance.

Co-axial detection and illumination with shear force dithering in a

Growing community of inventors

Newton, MA, United States of America

Bennett B Goldberg