Universiteit Gent

Cnrs

Vmicro Sas

Imec Vzw

Université De Lille

Ecole Centrale De Lille

Université Polytechnique Hauts-De-France

Isen Yncrea Hauts-De-France

Benjamin Walter

Jean-François Lampin

Mattias Verstuyft

Mathias Vanwolleghem

Bart Kuyken

An integrated photoacoustic transducer, sensing system and method for assisting in sensing a concentration of a species in a fluid such that the integrated photoacoustic transducer includes a waveguide structure. The waveguide structure has an optical resonance spectrally overlapping a spectral absorption line or band of the species. The photoacoustic transducer includes at least one acoustic cavity formed in a portion of the waveguide structure and configured for receiving the fluid for sensing comprising the species. The at least one acoustic cavity has an acoustic resonance spectrally overlapping with a harmonic of a modulation frequency. At least one acoustic transducer comprising a deformable mechanical portion is included in the photoacoustic transducer. The deformable mechanical portion is in direct acoustic communication with the at least one acoustic cavity and has an adjustable mechanical resonance, which can be brought into spectral overlap with an acoustic resonance of the least one acoustic cavity.

Photoacoustic transducer

Growing community of inventors

Lille Hellemmes, France

Benjamin Walter