Asml Netherlands B.v.

Benjamin Sams

Theodorus Wilhelmus Driessen

Dietmar Uwe Herbert Trees

Georgiy Olegovich Vaschenko

Peter Michael Baumgart

Chirag Rajyaguru

Armin Ridinger

Vikas Giridhar Telkar

Janine Kardokus

Brandon Michael Johnson

Alexander Igorevich Ershov

Edwin Johan Buis

Bob Rollinger

Serkan Kincal

Herman Harry Borggreve

A fluid control device () includes a structure () defining a valve cavity, a first fluid port (), a second fluid port (), and a third fluid port () configured to be fluidly coupled to a hermetic interior () of a body; and a plunger valve () within the valve cavity and configured to move between first and second modes while maintaining the hermetic interior of the body. In the first mode, the plunger valve is open such that a first fluid flow path is open between the hermetic interior and the first fluid port and fluid is free to pass between the first fluid port and the hermetic interior. In the second mode, the plunger valve is closed such that the first fluid port is blocked from the hermetic interior by the plunger valve and a second fluid flow path is open between the hermetic interior and the second fluid port.

Fluid control device and method for fluid control in an extreme ultraviolet light source

A droplet generator nozzle () includes a metal body (), a metal fitting () arranged adjacent to the metal body, and a capillary () comprising a first end and a second end. The first end of the capillary is disposed within the metal fitting, and the capillary is configured to eject initial droplets of a material from the second end of the capillary. The droplet generator nozzle further includes an electromechanical element () disposed within the metal body and coupled to the first end of the capillary and a fastener element () configured to clamp around a portion of the metal body and around the metal fitting. The electromechanical element is configured to apply a change that affects droplet generation from the capillary. The second end of the capillary protrudes out from an opening in the fastener element of the droplet generator nozzle. Droplet generator nozzleof FIG.C represents the embodiment shown in FIG.B, in a cross section orthogonal to the cross section shown in FIG.B.

Hybrid droplet generator for extreme ultraviolet light sources in lithographic radiation systems

A target material supply apparatus includes: first and second fluid flow components () that define an axial flow path when joined together, in which the axial flow path is between a source of target material fluid and a nozzle supply apparatus; and a coupling apparatus configured to seal the joint between the first and second fluid flow components. The coupling apparatus includes a gasket () having an annular shape defining an inner opening that is a part of the axial flow path when seated and sealed. When the gasket is seated between the first and second fluid flow components to thereby seal the joint formed by attaching the first and second fluid flow components, pressure applied to the gasket from target material fluid traversing the gasket inner opening along the axial flow path improves the hermetic function of the seal at the joint. Optionally, a functional insert like e.g. a flow restrictor () can be seated in the gasket.

Robust fluid coupling apparatus

A method of manufacturing a nozzle for a droplet generator for a laser-produced plasma radiation source is disclosed. The method comprises disposing a glass capillary in a throughbore of a metal fitting, heating the metal fitting; and applying a pressure to the glass capillary such that the glass capillary conforms to the shape of, and forms a direct glass-to-metal seal with, the throughbore. Also disclosed is a nozzle for a droplet generator for a laser-produced plasma radiation source, and the radiation source itself, wherein the nozzle comprises the glass capillary for emitting fuel as droplets and the metal fitting for coupling the glass capillary to a body of the droplet generator, the glass capillary being conformed to a shape of a throughbore of the metal fitting, and wherein the glass capillary forms a direct glass-to-metal seal with the throughbore.

Droplet generator nozzle

A deoxidation system for purifying target material for an EUV light source includes a furnace having a central region and a heater for heating the central region in a uniform manner. A vessel is inserted in the central region of the furnace, and a crucible is disposed within the vessel. A closure device covers an open end of the vessel to form a seal having vacuum and pressure capability. The system also includes a gas input tube, a gas exhaust tube, and a vacuum port. A gas supply network is coupled in flow communication with an end of the gas input tube and a gas supply network is coupled in flow communication with an end of the gas exhaust tube. A vacuum network is coupled in flow communication with one end of the vacuum port. A method and apparatus for purifying target material also are described.

Method of purifying target material for an EUV light source

Method and apparatus for purifying target material for EUV light source

Growing community of inventors

San Diego, CA, United States of America

Benjamin Sams