International Business Machines Corporation

Benjamin Paul Tongue

David Clifford Long

Harsaran S Bhatia

Harvey Charles Hamel

Edward R Pillai

Christopher D Setzer

Raschid Jose Bezama

Jason Scott Miller

William W Harkins

Christopher E Pepe

John A Rudy

Ronald M Rothkranz

A method and apparatus for the rapid cooling of screen masks used in the fabrication of semiconductor components is provided. The method and apparatus use a specially designed cooling plate which is contacted with a mask frame holding the screening mask. After a heated cleaning step which cleans the mask frame and screening mask of metal paste used in the screening operation, the cooling plate having one or more concave lower surfaces contacts the upper surfaces of the mask frame and bends the mask frame in the shape of the concave surfaces. This ensures intimate contact between the cooling plate and mask frame and enhances the thermal efficiency of the cooling step.

Method and apparatus for rapid cooling of metal screening masks

A dielectric substrate having an embedded inductor wherein each turn of the inductor traverses several layers such that the top and bottom of each turn of the inductor are parallel to each other but are in different layers and the sides of each turn of the inductor traverse at least one layer to connect the top and bottom of the inductor.

Embedded inductor and method of making

Method of forming a dielectric substrate having a multiturn inductor

MLC (multilayer ceramic) frequency selective circuit structures are disclosed. The MLC frequency selective circuit structures have a solenoid and toroid coil geometry in a multilayer electronic package which functions as a frequency selective tuned circuit in which both the number of turns and the aspect ratio of the solenoid coil are selected to adjust the tuned frequency. In some embodiments, a plurality of such coils can be connected together to provide a selected bandwidth about a tuned center frequency.

MLC frequency selective circuit structures

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Fishkill, NY, United States of America

Benjamin Paul Tongue