Kla Tencor Corporation

Kla Corporation

Benjamin James Thomas Clarke

Hong Xiao

Michael John Van Riet

Joseph A Di Regolo

Cecelia Anne Campochiaro

Harsh Sinha

Tzachi Pressburger

Asaf Wiseman

Michael Brisman

The system includes a robot interface disposed on a robot arm, and an end effector configured to selectively couple to the robot arm via the robot interface. The end effector includes an upper jaw, a lower jaw, and a pair of arms configured to carry a substrate. The upper jaw and the lower jaw are spaced apart in a first direction and biased together, and the pair of arms are spaced apart in a second direction orthogonal to the first direction. When the end effector is coupled to the robot arm, the robot interface is disposed between the upper jaw and the lower jaw. To exchange the end effector, the upper jaw and the lower jaw can be separated to release the robot interface.

Cleanroom compatible robotic end effector exchange system

One embodiment relates to a method of preparation of a sample of a substrate for sub-surface review using a scanning electron microscope apparatus. A defect at a location indicated in a first results file is re-detected, and the location of the defect is marked with at least one discrete marking point having predetermined positioning relative to the location of the defect. The location of the defect may be determined relative to the design for the device, and a cut location and a cut angle may be determined in at least a partly-automated manner using that information. Another embodiment relates to a system for preparing a sample for sub-surface review. Another embodiment relates to a method for marking a defect for review on a target substrate. Other embodiments, aspects and feature are also disclosed.

Systems and methods for preparation of samples for sub-surface defect review

Growing community of inventors

Milpitas, CA, United States of America

Benjamin James Thomas Clarke