Air Products and Chemicals, Inc.

Benjamin James Arthur Inman

Eugene Joseph Karwacki, Jr

Neil Alexander Downie

John Irven

Suhas Narayan Ketkar

Timothy John Maykut

A system for providing a high purity acetylene comprising 100 ppm or less solvent to a point of use comprising a storage vessel that houses an acetylene feed steam comprising acetylene and solvent; a cooling system that maintains the storage vessel and provides the acetylene feed stream at a temperature ranging from 20&#xb0; C. to &#x2212;50&#xb0; C.; and a purifier in fluid communication with the storage vessel wherein the acetylene feed stream is introduced into the purifier at a temperature ranging from &#x2212;50&#xb0; C. to 30&#xb0; C. to remove at least a portion of the solvent contained therein and provide the high purity acetylene.

Process and system for providing acetylene

A system and a process for providing acetylene, preferably at a high purity level (e.g., comprising 100 parts per million ('ppm'), or 10 ppm, or 1 ppm, or 100 parts per billion ('ppb'), or 10 ppb, or 1 ppb or less of solvent), to a point of use, such as a semiconductor manufacturing process, is described herein. In one aspect, there is provided a process for providing a process for providing a high purity acetylene comprising 100 ppm or less solvent to a point of use comprising: providing an acetylene feed stream comprising acetylene and solvent at a temperature ranging from 20&#xb0; C. to &#x2212;50&#xb0; C.; and introducing the acetylene feed stream to a purifier at a temperature ranging from &#x2212;50&#xb0; C. to 30&#xb0; C. to remove at least a portion of the solvent contained therein and provide the high purity acetylene.

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Basingstoke, United Kingdom

Benjamin James Arthur Inman