Setra Systems, Inc.

Benjamin F Fontaine

Eric Christopher Beishline

Gino Amaro Pinto

Kevin Bourbeau

Michael J Amirto

A pressure sensor () useful as a vacuum manometer. A reference pressure cavity () of the sensor is evacuated through an evacuation opening () located behind a plate portion () of the sensor electrode () having a non-planar surface for supporting the diaphragm () during an overpressure event. The electrode is hermetically sealed to the body () of the sensor by a brazed joint with a ceramic seal member () disposed there between. The brazed joint may include a layer of buffer material () which provides a degree of malleability to the joint to avoid cracking of the ceramic seal member. The brazed ceramic/metal joint permits the selection of materials such that differential thermal expansion effects can be passively minimized. The electrode is connected to the sensor circuitry () by a wire having a spring section (), thereby providing a stress free interconnection.

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Lunenburg, MA, United States of America

Benjamin F Fontaine