Other

Eastman-kodak Company

Spin Physics, Inc.

Deposition Technology, Inc.

Benjamin B Meckel

Nathan K Meckel

Emily I Bromley

Disclosed is a method for producing vertical recording media by using magnetically-assisted sputtering apparatus to sputter from a magnetic target while selected portions of the target are heated to a temperature at or above Curie. Also disclosed are improved means for supporting the magnetic target during sputtering which permits the realization of enhanced sputtering efficiencies.

Magnetically-assisted sputtering method for producing vertical recording

Disclosed herein is means adapted for use in combination with magnetically-enhanced sputtering devices whereby said devices are rendered more useful for sputter-coating substrates susceptible to heat-induced deterioration. Said means comprises a screen-like mesh or grid member disposed intermediate the target of said device and the substrate to be coated, and in such a position that said means is also disposed across the magnetic field formed by said device. Said screen-like mesh or grid member is formed of material which is magnetizable in response to the disposition thereof across said magnetic field. Said screen-like mesh or grid member has the desirable effect of suppressing the expansion of heated plasma whereby said plasma is confined to a region proximate said target and generally away from said substrate. Also disclosed is improved anodic means for collecting fast electrons emitted from said target.

Sputtering device adaptable for coating heat-sensitive substrates

To provide a thin film magnetic head having good low frequency response, the invention teaches the use of a movable mask technique whereby a first deposited magnetic film is provided with a tapered, or knife-, edge. Gap spacer material is then deposited on the film knife-edge. Thereafter, a second magnetic film is deposited atop the knife-edge, as well as on the same substrate that supports the first magnetic film. What results, therefore, is a slant gap thin film magnetic head having good low frequency response.

Method of making a thin film magnetic head having good low frequency

Thin film magnetic head having good low frequency response

The advantages of magnetron sputtering are applied to magnetic target materials by substantially reducing the saturation magnetization of the target material temporarily, and magnetron sputtering the magnetic material while in such a state of reduced magnetization. A technique is disclosed for using the thermal energy inherent in the sputtering process for initially heating the target material to its Curie temperature, thereby rendering the material non-magnetic, and for maintaining the target temperature at or above such temperature during the sputtering process.

Magnetron sputtering of magnetic materials

A sputtered thin film coating characterized by a stepwise and/or variable refractive index as a function of film depth. By means of an in-line assembly of planar magnetrons, each magnetron essentially isolated from the others but for a region of sputtering overlap, select materials and combinations of said materials with reactive gases can be continuously deposited upon a dynamic substrate whereby to obtain pre-determined refractive index gradients. Substrates coated with an inhomogeneous thin film exhibit superior non-spectral reflective characteristics particularly desirable for architectural designs and applications.

Method for producing an inhomogeneous film for selective

The advantages of magnetron sputtering can be applied to magnetic target materials by substantially reducing the saturation magnetization of the target material temporarily, such as by heating the target material to its Curie point, and magnetron sputtering the magnetic material while in such a state of reduced magnetization. Disclosed herein is a magnetic target plate which is structured to facilitate heating of the plate to its Curie point by the thermal energy inherent in the conventional sputtering process.

Growing community of inventors

Del Mar, CA, United States of America

Benjamin B Meckel