Globalfoundries Singapore Pte. Ltd.

Beng Lye Oh

Purakh Raj Verma

Jeoung Mo Koo

Vito Dai

Wye Boon Loh

Chiu Wing Hui

Yeow Loye Siew

Paul Kim Cheong Soh

System and methods for design-for-manufacturing and design-enabled-manufacturing (DFM-DEM) proactive integrated manufacturing flow are presented. A method includes receiving design data related to layout of an integrated circuit (IC); extracting information from the design data; and performing analysis on the extracted information. The method also enables DFM-DEM aware manufacturing applications using information stored in a knowledge database. The method further updates the knowledge database with new information learned from at least the extracted information and the analysis.

Design-for-manufacturing&#x2014;design-enabled-manufacturing (DFM-DEM) proactive integrated manufacturing flow

There is provided a method comprising receiving data corresponding to a layout design for a plurality of input mask layers and generating a layout design for at least one generated mask layer. The relationship between a first geometric element in a first layout pattern comprising one or more of the generated mask layers and a second geometric element in a second layout pattern is then determined and verified to check if they comply with predetermined rules. If the relationship does not conform with the predetermined rules the design of at least one of the generated mask layers associated with the first or second layout pattern is modified.

Methodology for performing post layer generation check

Growing community of inventors

Singapore, Singapore

Beng Lye Oh