Jobin Yvon S.a.

Horiba Jobin Yvon Sas

Benferhat Ramdane

Bernard Drevillon

Edouard Da Silva

Denis Cattelan

Pascal Amary

The invention concerns an apparatus for optically characterising a thin-layer material by backscattering Raman spectometry comprising a frame, a monochromatic excitation laser source ( ), optical means ( ) directing a light flux emitted by the source towards the material to be characterised, provided with means ( ) homogenising the distribution of energy per surface unit, over a minimum surface of some tens of square micrometers, and means for collecting ( ) and selecting ( ) the light diffused by Raman effect. The apparatus further comprises reflectometric measuring means ( ) integral with the Raman measuring means, including reflectometric excitation means ( ) directed on the same sample zone as the Raman excitation means.

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Oncy-Ecole, France

Benferhat Ramdane