Robert Boschgmbh

Benedikt Stein

Christoph Schelling

Rolf Scheben

Michael Stumber

Christian Huber

Christoph Daniel Kraemmer

Martin Husnik

Reinhold Roedel

Fabian Purkl

Thomas Buck

Ralf Noltemeyer

Ricardo Ehrenpfordt

Marc Schmid

Eugen Baumgart

Heiko Stahl

Arnim Hoechst

Ingo Herrmann

Bernhard Gehl

Theresa Lutz

Robert Schittny

Florian Michel

Marion Hermersdorf

A spectrometer device includes an optical interference filter which is designed to filter specific wavelength ranges of an incident light beam on passage through the optical interference filter. The spectrometer device also includes a detector device which is designed to detect the filtered light beam. Further, the spectrometer device includes a focusing device with a reflective surface. The focusing device is designed to focus the filtered light beam onto the detector device by reflection on the surface.

Spectrometer device and method for producing a spectrometer device

A spectrometer apparatus is disclosed that includes at least one light source for irradiating a sample with light, an optical detection device for detecting light scattered by the sample, at least one optical filter device, which is arranged in front of and/or behind the sample, a contact sensor device for determining a contact between the sample and the spectrometer apparatus and for outputting a corresponding output signal, a control device for controlling the light source and the detection device in response to the output signal. The control device is designed such that the control device modifies at least one operating parameter of the light source and the detection device, when the output signal indicates the contact between the sample and the spectrometer apparatus. A method for operating a spectrometer apparatus is disclosed as well.

Spectrometer apparatus and a corresponding method for operating a spectrometer apparatus

An optical element for light concentration for a predefined wavelength range, includes a holding sleeve which is formed in such a way that a light passage volume is framed by at least one reflective partial surface of the holding sleeve, and a light transmission element, with which the light passage volume is at least partly filled and which is transmissive, at least for the predefined wavelength range. The light transmission element is at least partly formed from at least one medium that is diffuse for the predefined wavelength range, and has at least one first subregion having at least a first diffusivity and a second subregion having at least a second diffusivity differing from the first diffusivity. The disclosure further relates to a method for producing an optical element for light concentration.

Optical element for light concentration and production method for an optical element for light concentration

The disclosure relates to an interferometer element for use in a spectrometer which includes a micromechanical Fabry-Perot filter element, which has at least a first mirror element, a second mirror element, and a third mirror element. Each of the first mirror element, the second mirror element, and the third mirror element are arranged in series in an optical path of the interferometer element, and at least one of a first distance between the first and second mirror elements, and a second distance between the second and third mirror elements is modifiable.

Interferometer element, spectrometer and method for operating an interferometer

A spectrometer device includes a Fabry-Perot interferometer unit, which comprises a first carrier substrate, wherein the first carrier substrate is arranged on a lower side of the Fabry-Perot interferometer unit and includes an optical aperture. The spectrometer includes at least one of a first substrate, which is arranged on an upper side of the Fabry-Perot interferometer unit, which faces away from the lower side, and a second substrate with the first carrier substrate arranged with the lower side on the second substrate. The spectrometer further includes a photodetector device arranged on or in the at least one of the second substrate and the first substrate. A first electrical connection region of the photodetector device and a second electrical connection region of the Fabry-Perot interferometer unit are electrically contacted from the same direction.

An interferometer includes a holding element having an actuation recess, a first mirror element arranged on the holding element opposite the actuation recess, and a second mirror element arranged opposite the first mirror element at a mirror distance, to form an optical slit. The first mirror element is arranged between the second mirror element and the holding element and the optical slit is spatially separated from the actuation recess by the first mirror element. The interferometer further includes an electrode pair including a first actuation electrode in one of the mirror elements and a second actuation electrode on a side of the actuation recess opposite the first actuation electrode. The mirror distance can be varied by applying an electrical voltage to the electrode pair.

Interferometer and method for producing an interferometer

A miniature spectrometer includes an optical system, a polarization interferometer with a polarizer and a Savart element and an analyzer, a detection unit with a detector, and a data unit. The optical system of the miniature spectrometer is configured as a diffuser.

Miniature spectrometer and a spectroscopic method

Measures are provided, by which mechanical stresses within the diaphragm structure of a MEMS component may be intentionally dissipated, and which additionally enable the implementation of diaphragm elements having a large diaphragm area in comparison to the chip area. The diaphragm element is formed in the layer structure of the MEMS component. It spans an opening in the layer structure and is attached via a spring structure to the layer structure. The spring structure includes at least one first spring component, which is oriented essentially in parallel to the diaphragm element and is formed in a layer plane below the diaphragm element. Furthermore, the spring structure includes at least one second spring component, which is oriented essentially perpendicularly to the diaphragm element. The spring structure is designed in such a way that the area of the diaphragm element is greater than the area of the opening which it spans.

MEMS component including a diaphragm element which is attached via a spring structure to the component layer structure

A layer material which is particularly suitable for the realization of self-supporting structural elements having an electrode in the layer structure of a MEMS component. The self-supporting structural element is at least partially made up of a silicon carbonitride (SiCN)-based layer.

MEMS component

For a MEMS component, in the layer structure of which at least one sound-pressure-sensitive diaphragm element is formed, which spans an opening or cavity in the layer structure and the deflections of which are detected with the aid of at least one piezosensitive circuit element in the attachment area of the diaphragm element, design measures are provided, by which the stress distribution over the diaphragm surface may be influenced intentionally in the event of deflection of the diaphragm element. In particular, measures are provided, by which the mechanical stresses are intentionally introduced into predefined areas of the diaphragm element, to thus amplify the measuring signal. For this purpose, the diaphragm element includes at least one designated bending area, which is defined by the structuring of the diaphragm element and is more strongly deformed in the event of sound action than the adjoining diaphragm sections.

MEMS component including a sound-pressure-sensitive diaphragm element and piezosensitive signal detection

A MEMS microphone component including at least one sound-pressure-sensitive diaphragm element is formed in the layer structure of the MEMS component, which spans an opening in the layer structure. The diaphragm element is attached via at least one column element in the central area of the opening to the layer structure of the component. The deflections of the diaphragm element are detected with the aid of at least one piezosensitive circuit element, which is implemented in the layer structure of the diaphragm element and is situated in the area of the attachment of the diaphragm element to the column element.

MEMS component including a sound-pressure-sensitive diaphragm element

Measures for reducing parasitic capacitances in the layer structure of capacitive MEMS sensor elements, in which parasitic capacitances between bond pads for electrically contacting measuring capacitor electrodes and an electrically conductive layer lying underneath are reduced by these measures. The sensor structure having the measuring capacitor electrodes and bond pads of such MEMS components are in a layer structure on a semiconductor substrate. The carrier layer directly underneath the bond pad structure is uninterrupted in the bond pad region, and the layer structure includes at least one insulation layer by which at least one of the bond pads is electrically insulated from an electrically conductive layer lying underneath. At least one layer under the carrier layer is structured in the region of this bond pad, so that hollow spaces are situated in the layer structure underneath this bond pad, by which the parasitic capacitance between this bond pad and the conductive layer lying underneath is reduced. Alternatively/additionally, the material of the conductive layer in the region underneath this bond pad is replaced by electrically conductive material at least in the upper layer region, so that the insulation layer in the region of this bond pad is considerably thicker than outside the bond pad region.

Capacitive MEMS-sensor element having bond pads for the electrical contacting of the measuring capacitor electrodes

A micromechanical sound transducer system and a corresponding manufacturing method, in which the micromechanical sound transducer system includes a substrate having a front side and a back side, the substrate having a through opening extending between the back side and the front side, and a coil configuration on the front side having a coil axis, which runs essentially parallel to the front side, the coil configuration covering the through opening at least partially. Also provided is a magnet device, which is situated so as to allow for an axial magnetic flux to be generated through the coil configuration. The coil configuration has a winding device which has at least first winding sections made from at least one layer of a low-dimensional conductive material, the coil configuration being configured to inductively detect and/or generate sound.

Growing community of inventors

Stuttgart, Germany

Benedikt Stein