Asml Netherlands B.v.

Benedictus Mathijs Renkens

Gerardus Hubertus Petrus Maria Swinkels

Denis Alexandrovich Glushkov

Ronald Johannes Hultermans

Niek Antonius Jacobus Maria Kleemans

Christiaan Johannes Petrus Verspeek

A source collector apparatus for use in a lithographic apparatus includes a fuel droplet generator configured in use to generate a stream of fuel droplets directed from an outlet of the fuel droplet generator towards a plasma formation location. In order to prevent droplet satellites from interfering with plasma formation, a gas supply is provided that in use provides a flow of gas (e.g., hydrogen) that deflects any droplet satellites out of the fuel droplet stream. Additionally, a detection apparatus may be provided as part of a shroud to determine the point at which coalescence of fuel droplets occurs thereby providing an indication of the likelihood of satellite droplets being present in the fuel droplet stream.

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Sittard, Netherlands

Benedictus Mathijs Renkens