Kla Corporation

Kla Tencor Corporation

Ben Clarke

Christopher Sears

Michael Friedmann

Chao Chang

Mark Lin

Jongjin Kim

Will Schumaker

A gripper assembly is disclosed. The gripper assembly includes a stage, a mounting platform, and a plurality of the flexible gripper elements. The flexible gripper element is configured to grip an object. The flexible gripper elements are supported by a first end piece, where the first end piece is attached to the mounting platform. The mounting platform is connected to the stage, where the stage is moveable. The flexible gripper element includes a hollow section that is selectively pressurizable. The hollow section includes one or more zones, where each zone includes chambers which are pressurizable by a fluid input. The selective pressurization of the hollow section allows the flexible gripper element to grip the object.

Soft gripper with multizone control to allow individual joint articulation

Methods and systems for generating X-ray illumination from a laser produced plasma (LPP) employing a low atomic number, cryogenic target are presented herein. A highly focused, short duration laser pulse is directed to a low atomic number, cryogenically frozen target, igniting a plasma. In some embodiments, the target material includes one or more elements having an atomic number less than 19. In some embodiments, the low atomic number, cryogenic target material is coated on the surface of a cryogenically cooled drum configured to rotate and translate with respect to incident laser light. In some embodiments, the low atomic number, cryogenic LPP light source generates multiple line or broadband X-ray illumination in a soft X-ray (SXR) spectral range used to measure structural and material characteristics of semiconductor structures. In some embodiments, Reflective, Small-Angle X-ray Scatterometry measurements are performed with a low atomic number, cryogenic LPP illumination source as described herein.

Laser produced plasma illuminator with low atomic number cryogenic target

A scanning electron microscopy system for mitigating charging artifacts includes a scanning electron microscopy sub-system for acquiring multiple images from a sample. The images include one or more sets of complementary images. The one or more sets of complementary images include a first image acquired along a first scan direction and a second image acquired along a second scan direction opposite to the first scan direction. The system includes a controller communicatively coupled to the scanning electron microscopy sub-system. The controller is configured to receive images of the sample from the scanning electron microscopy sub-system. The controller is further configured to generate a composite image by combining the one or more sets of complementary images.

Method and system for reducing charging artifacts in scanning electron microscopy images

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Milpitas, CA, United States of America

Ben Clarke