Lam Research Corporation

Behzad Lajevardi

Henry T Chan

Tom Trinh

Ales Janhar

Willie Ku

A network interface controller for a communication network of a substrate processing system includes a data collection module configured to monitor a communication bus to retrieve and store data frames transmitted between components of the substrate processing system. A user interface is configured to receive inputs for configuring extraction of data from the data frames. A data processing module is configured to store, based on a network configuration file, a map correlating data within the data frames to of the components of the substrate processing system, extract data from the data frames in accordance with the inputs received by the user interface and the map, and provide, to the user interface, the data as extracted from the data frames. The user interface is further configured to display the data as extracted from the data frames in accordance with the inputs received by the user interface.

Extracting real-time data from EtherCAT sensor bus in a substrate processing system

A data capture module includes a first port configured to receive first data transmitted from a first component to a second component of a substrate processing system, a second port configured to received second data transmitted from the second component to the first component, a first data stream forwarding module configured to duplicate the first data, forward the duplicated first data to the second port, and output the first data, and a second data stream forwarding module configured to duplicate the second data, forward the duplicated second data to the first port, and output the second data. The first port is configured to transmit the duplicated second data to the first component and the second port is configured to transmit the duplicated first data to the second component. A data compression module is configured to compress the first and second data. Data storage is configured to store the compressed data.

Growing community of inventors

Fremont, CA, United States of America

Behzad Lajevardi