Brooks Automation Gmbh

Jenoptik Infab, Inc.

Bedford E Hardee

Raymond Walter Ellis

Kenneth D Van Antwerp, Jr

Michael C Simmons

Andrew S Extine

Michael R Lemchak

Dennis L Myers

A module for use in a system for processing articles, in which the system includes a plurality of machine tools for processing articles, a pod for carrying the articles to be processed by the machine tools from one machine tool to another, a host processing controller associated with the machine tools for controlling the operation thereof, a robot connected to each machine tool for receiving a pod, opening the pod and for transporting the articles from within the pod into position on the machine tool for processing. An identification device is carried by the pod for identifying a particular pod and the articles carried in the pod. The module includes a single wire connection between the identification system, the host controller and the robot. The module has a microprocessor to identify the source of a signal and for routing the signal between the identification system and the host controller and between the host controller and the robot depending on its source.

Integrated material management module

An apparatus for tracking items in a factory is disclosed. The apparatus is partially well suited for manufacturing environments wherein there are a plurality of items to be kept together in groups. The invention is particularly useful in semiconductor processing facilities wherein batches of semiconductor wafers to be processed are placed in wafer carriers which are, in turn, placed in work-in-progress boxes. Applying identification tags to one item that can be read and processed by a microterminal attached to the other item provides an effective way to prevent improper grouping of the items which can lead to misprocessing or handling of the batches of wafers.

Method for electronically tracking containers to avoid misprocessing of

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Woodland Park, CO, United States of America

Bedford E Hardee