Elemental Scientific, Inc.

Beau A Marth

Daniel R Wiederin

Tyler Yost

Jared Kaser

Jonathan Hein

Jae Seok Lee

Stephen H Sudyka

Jae Min Kim

Austin Schultz

Mason Spilinek

Systems and methods are described for determining whether liquid remains on a wafer surface following a scanning operation. A system embodiment includes, but is not limited to, a first system configured for positioning adjacent a transfer line coupled with a scanning nozzle to dispense fluid onto a wafer surface and to recover the fluid from the wafer surface, the first system configured to detect a gas/liquid transition of the fluid and determine a volume of liquid sample dispensed; a second system configured for positioning adjacent a second line downstream from the scanning nozzle, the second system configured to detect a gas/liquid transition of fluid flowing through the second line and determine a volume of liquid sample recovered from the wafer surface; and a controller configured to generate an alert if the volume of liquid sample recovered is not within a threshold amount compared to the volume of liquid sample dispensed.

Systems and methods for determining flow characteristics of a fluid segment for analytic determinations

Systems and methods are described for integrated sample container cover removal and sample probe positioning. In an example implementation, an autosampler system includes, but is not limited to, a z-axis support rotatable about a z-axis of an autosampler deck; a sample probe support structure coupled to the z-axis support, the sample probe support structure configured to hold a sample probe to withdraw a fluid-containing sample held within a sample container supported by the autosampler deck; and a sample cap remover coupled to the z-axis support in an orientation that is rotationally offset from the z-axis support with respect to the sample probe support structure, the sample cap remover configured to lift a cap from the sample container to provide access to an interior of the sample container by the sample probe supported by the sample probe support structure.

Autosampler system with automated sample container cover removal and sample probe positioning

Systems and methods are described for introducing one or more fluid streams from a nozzle having one or more shaped channels to one or more material surfaces and removing the fluid streams for scanning for chemical species of interest. A nozzle embodiment includes, but is not limited to, a nozzle body configured to couple to a positionable nozzle arm support for positioning the nozzle with respect to a material surface, the nozzle body defining at least one fluid port to receive a fluid; and a nozzle hood coupled to the nozzle body, the nozzle hood defining an elongated shaped channel having a first fluid channel and a second fluid channel extending from the at least one fluid port, the first fluid channel and the second fluid channel configured to direct fluid along the material surface within at least a portion of each of the fluid channels.

Shaped-channel scanning nozzle for scanning of a material surface

Systems and methods are described for integrated decomposition and scanning of a material, such as a semiconducting wafer, a scanning nozzle includes, but is not limited to, a nozzle body defining one or more nozzle ports to receive fluid for introduction to the surface of the material and to recover fluid from the surface of the material, and a nozzle hood extending from the nozzle body, the nozzle hood defining an inner channel longitudinally disposed along the nozzle body, the nozzle hood further defining one or more outer channels longitudinally disposed along the nozzle body, the inner channel fluidically coupled with the one or more outer channels via one or more gaps defined by the nozzle hood.

Systems for integrated decomposition and scanning of a semiconducting wafer

Systems and methods are described for integrated decomposition and scanning of a semiconducting wafer, where a single chamber is utilized for decomposition and scanning of the wafer of interest.

Systems and methods are described for preventing the release of metal particles from an autosampler that could otherwise be detected within a sample during sample analysis. In an example implementation, an autosampler systems includes, but is not limited to, a sample probe support structure; a z-axis support; an outer shuttle coupled with an outer surface of the z-axis support; and an inner shuttle linearly moveable within an interior volume of the z-axis support, the inner shuttle magnetically coupled with the outer shuttle to translate linear motion of the inner shuttle to the outer shuttle.

Autosampler rail system with magnetic coupling for linear motion

Systems and methods for automatic preparation of samples through evaporative sampling for subsequent analysis are described. A system embodiment includes, but is not limited to, a sample source configured to supply a sample; an evaporation container fluidically coupled with the sample source to receive the sample; a temperature control element operably coupled with the evaporation container to vaporize a liquid portion of the sample within the evaporation container, the evaporation container fluidically coupled with a gas input to receive a gas to transport vapor from the evaporation container; and a cooling system configured to receive the vapor from the evaporation container and to condense the vapor for collection.

Growing community of inventors

La Vista, NE, United States of America

Beau A Marth