Carl Zeiss Jena Gmbh

Beate Moeller

Andreas N Dorsel

Karl-Heinz Donnerhacke

Karl-Heinz Bechstein

Guenter Rudolph

Andreas Wolfram

Klaus Dieter Salewski

Klaus-Dieter Salewski

Guenter Maschke

An interferometric arrangement for scanning an object with an illumination beam path comprises a diffractive optical element (DOE) for generating differently directed beam components of the illuminating light. The DOE is arranged in the illumination beam path in front of at least one scanning element deflecting the illuminating light in at least one direction.

Interferometric arrangement for scanning an object

The present invention is directed to a heterodyne interferometer arrangement with tunable laser light sources for absolute distance measurement. The phase angle changes which occur in the synthetic interference signals when varying the laser frequencies are recorded and evaluated. The arrangement also enables error-free distance measurement in the event of a change in the mathematical sign of the phase changes due to frequency jitter.

Heterodyne interferometer arrangement with tunable lasers, a heterodyne

An interferometer arrangement has an adjustable optical path length difference in at least one interferometer arm and a photoelectric receiver for detecting the interference signals generated by the interferometer. An incremental grating transmitter is coupled to the arrangement with a device for changing the optical path length difference and for generating a reference signal which changes its frequency like that of the interference signal depending on the rate of change of the optical path difference.

Interferometer arrangement with adjustable optical path length

The invention is directed to a reference interferometer with variable wavelength, with an interferometer splitter, a reference beam path, and a folded measurement beam path passing between two plane mirrors. At least one spacer element 10 is provided for realizing a fixed position of the plane mirrors relative to one another. The two plane mirrors are arranged in a plurality of planes in a defined manner in relation to one another such that a light beam coming from the interferometer splitter and coupled into the space between the plane mirrors at an entrance point at a slight angle is reflected repeatedly at the plane mirrors, and the reflection points lie along a parabola on the surfaces of the plane mirrors. A retroreflector is arranged downstream of the first plane mirror in such a way that the light beam striking it can be returned to the entrance point or in the vicinity thereof along the same path or almost the same path.

Reference interferometer with variable wavelength and folded measurement

An arrangement for measuring intraocular distances between different optical boundary surfaces of the human eye by at least one interferometric measurement system is provided. The arrangement further comprises at least one diffractive optical element (DOE) for dividing the illumination beam path into partial beam paths for different boundary surfaces and/or for combination and mutual adaptation of the wavefronts of measurement light components proceeding from different boundary surfaces and/or for adaptation of the wavefronts of measurement light components proceeding from different boundary surfaces of the eye to the wavefront of the measurement light of at least one interferometric reference arm.

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Jena, Germany

Beate Moeller