Nikon Corporation

Nikon Research Corporation of America

Bausan Yuan

Pai-Hsueh Yang

Michael B Binnard

Kazuhiro Hirano

Ting-Chien Teng

Martin E Lee

Yi-Ping Hsin

Andrew J Hazelton

W Thomas Novak

Scott Coakley

Kazuaki Saiki

Toshio Ueta

Kazuo Masaki

Shiang-Lung Koo

Douglas C Watson

Ping-Wei Chang

Tim Teng

Susumu Isago

Wen-Hou Ma

Hideyuki Hashimoto

Michael R Sogard

Nobutaka Magome

Akimitsu Ebihara

Akikazu Tanimoto

Susumu Makinouchi

Saburo Kamiya

Yutaka Hayashi

Masahiko Okumura

Kiyoshi Uchikawa

Yosuke Shirata

Jin Nishikawa

Takashi Nagata

Ryoichi Kawaguchi

Takeshi Asami

Henry Kwok Pang Chau

Tsutomu Ogiwara

Gabor D Szoboszlay

Christopher B Smith

Pai Hsueh Yang

Hideyaki Hashimoto

Xiao-Feng Yang

Ripul Bhutani

Fluid synthesis system and corresponding method for synthesis of slurry containing abrasive particles. The system and method are configured to substantially segregate the abrasive particles passing through the filter, used at the filtering step of the process, from the sticky components that clog such filter prior to the filtering step of the synthesis process to achieve a sustaining filtration of the slurry as a result of which the filter remains substantially unclogged for the whole predetermined duration of the filtering process.

Fluid synthesis system

A method for moving a stage relative to a base includes coupling a magnet assembly to the stage; coupling an array of coils to the base; and directing current to at least one of the coils with a control system that includes a processor to generate a force that levitates the stage relative to the base and moves the stage relative to the base. In one embodiment, the control system generates at least one current command that levitates and moves the stage while inhibiting the excitation of a first targeted flexible mode.

Motor with force constant modeling and identification for flexible mode control

Dehazed images are produced based on an atmospheric light image obtained form an input image as brightest pixels of a predetermined window and white map. The white map is median filtered, morphologically filtered and, in some examples, filtered with a guided filter, and the filtered image combined with the atmospheric light image to produce a dehazed image.

Neighborhood haze density estimation for single-image dehaze

A method for determining a commutation offset for a mover (A) of a mover assembly (C) that moves and positions a stage (A) relative to a stage base (B) includes controlling the mover assembly (C) in a closed loop fashion to maintain the position of the stage (A) along a first axis and along a second axis with the stage (A) levitated above the stage base (B). The method also includes the steps of (i) directing current to a coil array () of the mover assembly (C) so that the mover assembly (C) imparts a disturbance on the stage (A); and (ii) evaluating one or more forces generated by the mover assembly (C) as a result of the disturbance on the stage (A) created by the mover (A). Further, a method for generating a compensation map () includes sequentially directing a plurality of excitation signals to the control of the mover assembly (C) and determining the control commands that result from the plurality of excitation signals.

Method for determining a commutation offset and for determining a compensation map for a stage

Method for determing a commutation offset and for determining a compensation map for a stage

An exemplary piezoelectric actuator includes a piezoelectric transducer that exhibits displacements when energized with corresponding voltages. A control system is electrically connected to the piezoelectric transducer so as to provide the transducer with the voltages. The control system includes feedback of displacements of the transducer as functions of respective voltage commands and feed-forward of electrical currents passing through the transducer as functions of the respective voltages applied to the transducer. The control system further has a feedback controller connected to receive transducer-displacement data corresponding to the voltages applied to the transducer. The control system further can include a current-feed-forward amplifier connected to receive transducer-current data corresponding to the voltages applied to the transducer. Such a control system facilitates reduction of hysteresis in controlled actuation of the actuator.

Linearized control of piezoelectric actuator to reduce hysteresis

A projection optical device includes a projection optical system which projects an image of a pattern, a support member attached to the projection optical system, and a plurality of coupling members connected to the support member. The coupling members suspend and support the projection optical system through the support member from an upper direction of the support member. The projection optical device can include a frame to which one end of each of the coupling members is attached, such that the projection optical system hangs from the frame via the support member and the coupling members. A projection optical device also can include a liquid supply which supplies a temperature-controlled liquid to a side surface of a projection optical system utilizing gravity to cause the temperature-controlled liquid to flow along the side surface of the projection optical system.

Projection optical device and exposure apparatus

Methods and apparatus for providing vibration compensation using position measurements are disclosed. According to one aspect of the present invention, a method of compensating for vibrations of an object includes obtaining a plurality of position measurements associated with the object. The method also includes processing the plurality of position measurements to determine a derivative acceleration, and determining a compensatory force to counteract the vibrations of the object. Determining the compensatory force includes using the derivative acceleration. Finally, the method includes applying the compensatory force to the object.

Direct derivative feedforward vibration compensation system

A stage assembly () that moves a work piece () about a first axis and along a first axis includes a first stage (), a second stage () that retains the work piece (), a second mover assembly (), a measurement system, and an initialization system (A). The second mover assembly () moves the second stage () relative to the first stage () about the first axis. The measurement system () monitors the position of the second stage () about the first axis when the second stage () is positioned within a working range about the first axis. The initialization system (A) facilitates movement of the second stage () about the first axis when the second stage () is rotated about the first axis outside the working range. The second mover assembly () can include a mover () and a dampener () that reduces the transmission of vibration from the first stage () to the second stage (). In addition, the stage assembly () can include a control system () that directs power to the mover () to position the second stage () and to compensate for vibration of the first stage ().

Stage assembly with measurement system initialization, vibration compensation, low transmissibility, and lightweight fine stage

Methods, apparatus, and systems are disclosed for identifying force-ripple and/or side-forces in actuators used for moving a multiple-axis stage. The identified force-ripple and/or side-forces can be mapped, and maps of corresponding position-dependent compensation ratios useful for correcting same are obtained. The methods are especially useful for stages providing motion in at least one degree of freedom using multiple (redundant) actuators. In an exemplary method a stage member is displaced, using at least one selected actuator, multiple times over a set distance in the range of motion of the subject actuator(s). Each displacement has a predetermined trajectory and respective starting point in the range. For each displacement, respective section force-command(s) are extracted and normalized to a reference section force-command to define a section compensation-ratio. Multiple section compensation-ratios are assembled, as functions of displacement in the range, to provide a map of compensation ratios for the actuator(s) throughout the range.

On-machine methods for identifying and compensating force-ripple and side-forces produced by actuators on a multiple-axis stage

Disclosed are, inter alia, optical components that include an optical element (e.g., mirror) and at least three active-isolation mounts mounting the optical element to a frame (e.g., optical barrel or optical frame). An active-isolation mount has a non-contacting actuator connecting a respective location on the optical element to the frame and provides movability of the respective location relative to the frame in at least one direction. At least one displacement sensor is associated with each respective location on the optical element. The displacement sensors are sensitive to displacements of the respective locations in at least one respective direction and reference the displacements to an absolute reference. The actuators and sensors are connected to a servo control loop to provide feedback control.

Active-isolation mounts for optical elements

Process tools and methods are disclosed that involve interferometric and other measurements of movements and positions relative to a process position, such as movements and positions of a stage relative to a lithographic optical system. An exemplary apparatus includes a stage that places a workpiece relative to the tool, and that is movable in at least one direction relative to the tool. At least one first interferometer system is situated relative to the stage to determine stage position in a movement direction relative to the process position. A movement-measuring device determines displacement of the tool from the process position. Using data from the interferometer system and movement-measuring device a processor determines a position of the stage relative to the tool. The processor also corrects the determined position for displacement of the tool.

Interferometric position-measuring devices and methods

A precision assembly () for positioning a device () includes a stage () that retains the device (), a dual mover assembly () that moves the stage (), and the device () along a movement axis (), a measurement system () and a control system (). The dual mover assembly () includes a first mover () that moves the stage () along the movement axis () and a second mover () that moves the device () along the movement axis (). The second mover () is rigidly coupled to the first mover () so that movement of the first mover () results in movement of the second mover (). Further, the total output of the dual mover assembly () along the movement axis () is equal to the sum of the movement of the first mover () and the movement of the second mover (). The measurement system () measures a movement position along the movement axis (). The control system () controls the dual mover assembly () utilizing the movement position. The control system () is designed to effectively decouple the control of the first mover () from the control of the second mover (). Further, the control system () includes a quantization feedforward loop.

System for controlling a dual mover assembly for an exposure apparatus

Embodiments of the invention relate to a cable force feedforward approach that takes into account the cable force in the counter-mass trajectory computation to reduce or eliminate vibration of the lens body caused by the cable force disturbance and corrective force exerted by the trim motors. In one embodiment, a method provides cable force feedforward control for a counter-mass of a stage with a cable connected to the counter-mass and using the cable force feedforward control to control one or more trim motors to produce a trim motor output force to be applied to the counter-mass, the counter-mass moving in response to a reaction force from movement of the stage. The method comprises measuring a counter-mass position y of the counter-mass in response to forces applied to the counter-mass; measuring a cable force &#x192; exerted on the counter-mass by the cable which is connected to the counter-mass; generating a cable force function {circumflex over (&#x192;)}(y, {dot over (y)}) of the measured cable force &#x192; versus the counter-mass position y; and computing the trim motor output force u as where w is a weighting function having a value from 0 to 1 and is selected for optimization.

Minimum force output control method for counter-mass with cable

Growing community of inventors

San Jose, CA, United States of America

Bausan Yuan