Max-planck-gesellschaft Zur F&#xf6;rderung Der Wissenschaften E. V.

Carl Zeiss Microscopy Gmbh

Carl Zeiss Nts Gmbh

Carl Zeizz Nts Gmbh

Bastian Barton

Harald Rose

Gerd Ludwig Benner

Rasmus Schröder

Rasmus R Schröder

A phase-shifting element for shifting a phase of at least a portion of a particle beam is described, as well as a particle beam device having a phase-shifting element of this type. In the phase-shifting element and the particle beam device having a phase-shifting element, components shadowing the particle beam are avoided, so that proper information content is achieved and in which the phase contrast is essentially spatial frequency-independent. The phase-shifting element may have at least one means for generating a non-homogeneous or anisotropic potential. The particle beam device according to the system described herein may be provided with the phase-shifting element.

Phase-shifting element and particle beam device having a phase-shifting element

A phase-shifting element for shifting a phase of at least a portion of a particle beam is described, as well as a article beam device having a phase-shifting element of this type. In the phase-shifting element and the particle beam device having a phase-shifting element, components shadowing the particle beam are avoided, so that proper information content is achieved and in which the phase contrast is essentially spatial frequency-independent. The phase-shifting element may have at least one means for generating a non-homogeneous or anisotropic potential. The particle beam device according to the system described herein may be provided with the phase-shifting element.

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Frankfurt-am-Main, Germany

Bastian Barton