Asml Netherlands B.v.

Bas Jansen

Hans Butler

Johannes Petrus Martinus Bernardus Vermeulen

Michael Marinus Anna Steur

Andre Bernardus Jeunink

Cornelius Adrianus Lambertus De Hoon

Johannes Adrianus Cornelis Maria Pijnenburg

Wim Symens

Koen Martin Willem Jan Bos

Koen Johan Frederik Loonen

Samer Abdelmoeti Abuzeid Abdelmoeti

Aditya Singh

Ruben Etienne Johan Rinus Vandervelden

Sander Jeroen Hermanussen

Alexander Pascal Dijkshoorn

An object table including: a holding surface for holding an object; and an actuator arrangement configured to exert a holding force on the object for holding the object to the holding surface, wherein the actuator arrangement is further configured to decrease a strain in the object caused by the holding force by sequentially detaching and re-attaching portions of the object from the holding surface, while the object is held to the holding surface.

Object table, stage apparatus, holding method and lithographic apparatus

An actuator assembly including a first piezo actuator and a second piezo actuator. The piezo actuator has a correction unit configured to determine an output voltage difference representing a difference between a voltage at the output terminal of the first piezo actuator and a voltage at the output terminal of the second piezo actuator, and a first power correction for correcting the first power signal and/or a second power correction for correcting the second power signal, based on the output voltage difference.

Actuator assemblies comprising piezo actuators or electrostrictive actuators

Disclosed is a thermo-mechanical actuator () comprising a piezo¬electric module (), the piezo-electric module comprising at least one piezo-electric element (), wherein the thermo-mechanical actuator is configured to: •o receive a thermal actuation signal () for controlling a thermal behaviour of the piezo-electric module, or •o provide a thermal sensing signal () representative of a thermal state of the piezo-electric module, and, wherein the thermo-mechanical actuator is configured to: •o receive a mechanical actuation () signal for controlling a mechanical behaviour of the piezo-electric module, or •o provide a mechanical sensing signal () representative of a mechanical state of the piezo-electric module.

Thermo-mechanical actuator

An object table configured to hold an object on a holding surface, the object table including: a main body; a plurality of burls extending from the main body, end surfaces of the burls defining the holding surface; an actuator assembly; and a further actuator assembly, wherein the actuator assembly is configured to deform the main body to generate a long stroke out-of-plane deformation of the holding surface based on shape information of the object that is to be held and the further actuator assembly is configured to generate a short stroke out-of-plane deformation of the holding surface.

Object table, a stage apparatus and a lithographic apparatus

The invention relates to an object positioning system including an actuator system and a measurement system. The actuator system includes an actuator made of a material with predominantly electrostrictive properties and substantially no net polarization in absence of an electric field. The actuator system is configured to apply an electric field to the actuator, which electric field includes a bias electric field and an actuation electric field superimposed on the bias electric field, a field strength of the actuation electric field being equal to or smaller than a field strength of the bias electric field. The measurement system is configured to measure an electrical property of the actuator which is representative for a mechanical state of the actuator. The measurement system includes a bridge circuit including an actuator and a reference element having electrical properties matched to the electrical properties of the actuator.

Object positioning system diagnostic and calibration methods positioning control method lithographic apparatus and device manufacturing method

The invention relates to an electronic system for an accelerometer having a piezoelectric element and a first mechanical resonance frequency, comprising: a) a damping circuit configured to: &#x2014;receive an acceleration signal from the piezoelectric element; &#x2014;electronically dampen an amplitude of the first mechanical resonance frequency; and&#x2014;generate a damped acceleration signal, b) an extender configured to: &#x2014;receive the damped acceleration signal; &#x2014;extend the frequency response; and&#x2014;output an extended damped acceleration signal, wherein the extender is configured to have a first electronic anti-resonance frequency matching the damped first mechanical resonance frequency, and to have a frequency response between the first electronic anti-resonance frequency and a higher second frequency that is substantially opposite to a corresponding frequency response of the combination of the accelerometer and the damping circuit.

Electronic system, accelerometer, calibration method, lithographic apparatus and device manufacturing method

The invention provides a substrate support arranged to support a substrate, comprising piezo a actuator, further comprising a first pair of electrodes, a second pair of electrodes and a piezo material having a first surface and a second surface. The first surface is arranged along a first direction and second direction. The first pair of electrodes comprises a first electrode arranged on the first surface and a second electrode arranged on the second surface. The second pair of electrodes is arranged to shear the piezo material. The first pair of electrodes is arranged to elongate the piezo material in a third direction perpendicular to the first direction and second direction. The first electrode is divided into at least two parts and is arranged to rotate the first surface and the second surface relatively to each other about the first direction wherein the piezo actuator is arranged to support the substrate.

Piezoelectric actuator, actuator system, substrate support, and lithographic apparatus including the actuator

A positioning system including: a first body; a second body; and an actuator arranged between the first body and the second body to position the first body relative to the second body, wherein the actuator includes a first piezoelectric actuator and a second piezoelectric actuator arranged in series, wherein the first piezoelectric actuator has a first hysteresis, wherein the second piezoelectric actuator has a second hysteresis smaller than the first hysteresis, and wherein the second piezoelectric actuator has a positioning range at least equal to the first hysteresis.

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's-Hertogenbosch, Netherlands

Bas Jansen