Asml Netherlands B.v.

Nederlandse Organisatie Voor Toegepast-natuurwetenschappelijk Onderzoek

Bart Snijders

Arno Jan Bleeker

Pieter Willem Herman De Jager

Stanislav Y Smirnov

Karel Diederick Van Der Mast

Huibert Visser

Mark L Oskotsky

Lev Ryzhikov

Jason Douglas Hintersteiner

Borgert Kruizinga

Lev Sakin

Matthew McCarthy

Huib Visser

An imaging apparatus according to one embodiment of the invention includes a programmable patterning structure configured to pattern a projection beam of radiation according to a desired pattern. The programmable patterning structure includes a plurality of separate patterning sub-elements, each sub-element being configured to generate a patterned sub-beam. At least one of the separate patterning sub-elements is configured to generate a patterned sub-beam whose cross-section contains regions of different intensities. The imaging apparatus also includes a combining structure configured to combine the plurality of patterned sub-beams into a single patterned image, and a projection system configured to project the patterned image onto a target portion of a substrate.

Imaging apparatus

Telescope comprising two or more reflecting elements, wherein a light beam impinging on a first reflecting element leaves through a second reflecting element, in which the shape of the reflecting surface of the second reflecting element is concave. The shape of the reflecting surface of the first reflecting element is concave. An entrance pupil is arranged in the light path in front of the first reflecting element and the first reflecting element images the entrance pupil nearly in the focus of the second reflecting element.

Telescope with a large field of vision

Growing community of inventors

Rotterdam, Netherlands

Bart Snijders