Aixtron Se

Barry O′Neil

Benjamin David Wright

A device for depositing layers on flat substrates includes a susceptor which can be heated by a heating device. The substrates and cover plates enclosing same are arranged on an upper face of the susceptor facing a process chamber. The cover plates include inner cover plates, each of which forms an edge adjoining a substrate edge facing the center of the susceptor. The inner cover plates are arranged about the center of the susceptor in the circumferential direction, and adjacent ones of the inner cover plates adjoin each other at a separation joint. The separation joint is arranged at an angle α to a line which extends through the center of the susceptor and the center of one of the substrates in a radial direction.

Growing community of inventors

Herzogenrath, Germany

Barry O′Neil