Entegris, Inc.

Empak, Inc.

Adaptsys Limited

Emplast, Inc.

Barry Lee Gregerson

Brian Wiseman

Larry G Dressen

Matthew A Fuller

Jason T Steffens

Michael Shawn Adams

Russ V Raschke

Roger L Mortensen

Gary M Gallagher

Boyd C Wittman

David L Halbmaier

John A Leys

Anthony Mathius Tieben

Gary Gallagher

Justin Strike

Stephen Sumner

Robert Jacoby

James E Spitzer

Kelly Peterson

Jeffrey James McKenzie

Shawn D Eggum

Gregory W Bores

Michael C Zabka

James C Linder

Eric A Kirkland

Eric S Olson

Christian Andersen

Thomas Oesterle

Ryan Mushel

Christopher Paul Barck

Bonnie Bachman

Martin L Forbes

Jeffrey J Smith

Brett Christopher Reichow

Jim Wagner

Larry Dessen

Jean Camille L Ersando

Karen Anderson

Brian Massengale

Paul Schauer

Charles Dahle

Jason Todd Steffens

Jeffrey J Mckenzie

Brett C Reichow

Described are liquid filter apparatuses that include a housing, an interior within the housing, a cartridge assembly (otherwise known as a 'filter cartridge') contained within the housing, and a vent that allows gaseous fluid from an interior of the housing to be released to an exterior of the housing, as well as related methods.

Filter apparatus with vented core

An electrostatic discharge tubing segment includes a porous non-conductive interior surface and an adjacent conductive polymer portion. The conductive polymer portion is configured to transfer electrostatic charge generated by a charged fluid passing through the tubing segment to ground such that electrostatic discharge can be mitigated.

Electrostatic discharge mitigation tubing

Described are filter cartridges, filter apparatuses, and related methods that involve a filter cartridge that includes a cartridge support that includes centering surfaces, a helical strand, or both.

Filter cartridge, apparatus, and methods

A reticle pod includes an outer pod, an inner pod cover and an inner base plate. A reticle is supported on the base and is contained within the environment created by the inner pod cover and the inner pod base. The inner pod cover can include a plurality of reticle retainers configured to contact a side wall of the reticle and limit movement of the reticle in a horizontal direction.

Reticle pod having side containment of reticle

Disclosed herein is a filter having a housing having first and second end surfaces and interior and exterior surfaces, a membrane disposed within the tubular housing, a first end cap sealed to the first end surface of the tubular housing and the first end surface of the membrane; a second end cap sealed to the second end surface of the tubular housing and the second end surface of the membrane; and a fluid channel formed in the interior surface of the housing in a helical pattern. The helical pattern has a helical pitch in an axial direction of the housing of less than or equal to about 60 mm.

Filter with improved fluid flow

A modular filter manifold includes one or more plates, each plate including connections for one or more filters on a first side, and connections for fluid lines on a second side opposite the first. At least two fluid line connections are provided for each filter connection, with a fluid passage through the plate for each fluid line connection. Each of the fluid passages are independent of one another. The manifold plates can be joined to a support structure to form a manifold to which filters can be attached. Piping can be connected to the fluid line connections to allow flow through the filters in series or parallel flow.

Modular filter manifold

A fluid circuit includes a plurality of tubing segments and a plurality of operative components. Each tubing segment includes i) a non-conductive polymer portion defining a fluid passageway and ii) one or more interior conductive fluoropolymer stripes extending axially to the ends of each of the respective tubing segments. Each operative component includes a conductive fluoropolymer that extends between a plurality of tubing connector fittings forming a part of the fluid circuit, wherein each of the tubing connector fittings conductively connect the respective conductor of the operative component to the interior conductive fluoropolymer stripes of the tubing segment to provide a path to ground that extends through each operative component and each tubing segment.

Fluid circuit with integrated electrostatic discharge mitigation

A wafer container with a latch mechanism that provides sealing for large wafer containers, such as for 450 mm wafers, accomplishes secure door closing and latching with reduced torque requirements for rotating the central rotatable cam plate. In various embodiments, a camming slot formed in the rotatable cammed plate is arcuate and defined by opposing cam surfaces which are selectively engaged by a cam follower, such as a roller, attached to a proximal end of a latch arm. The roller can include unitary axle portions that snap into the proximal end of the latch arm and is supported at both axial ends of the roller. The proximal end of the latch arm can include parallel extensions separated by a gap, and have guide in surfaces to deflect the extensions as the axle portions of the roller are forced into position thereby seating the roller at both axial ends.

Wafer container with latching mechanism for large diameter wafers

A purge configurable wafer shipper. The container includes an enclosure portion with an open side or bottom, a door to sealing close the open side or bottom. One of the door and the container portion includes an opening formed in the enclosure portion to provide a fluid passageway from an interior of the wafer shipper to an exterior region. The opening may include a module receiving structure that defines the fluid passageway. A sealing member is included for insertion into the module receiving structure. The sealing member has a body portion including a support flange positioned proximate a lower portion of the body portion, a circumferential groove in the exterior surface of the body portion, and an O-ring positioned at least partially within the circumferential groove.

Wafer shipper with purge capability

Apparatuses and methods providing a ballast system for adjusting the center of gravity of a standardized front opening wafer container. Various embodiments of the disclosure present ballast systems that are low profile, do not require modifications to the shell of the wafer container, and can be retrofit to existing wafer carriers. In some embodiments, these capabilities are accomplished by a ballast that mounts to a kinematic coupling plate of the wafer container. In one embodiment, the ballasting can also provide sufficient counter force to the lifting forces associated with purging of the wafer container, thereby preventing 'lift off' of the wafer container during purging operations. The ballasts can be removed for shipping of the wafer container, thereby decreasing shipping costs.

Front opening wafer container with weight ballast

An improved wafer support mechanism in a wafer container useful for carrying a plurality of axially aligned thin mostly circular wafer substrates. The container includes a cassette that has a plurality of adjacently disposed teeth for receiving the substrates, wherein each rib member is continuous from the cassette open top to the cassette open bottom, a removable top cover portion, a removable bottom cover portion, a cushion assembly removably attached to the container top cover, and another cushion assembly removably located in the container bottom cover and held in place by the weight of the wafer cassette. The top cushions are formed of individual segments having an extended lead-in feature at the end of each segment, spring sections in each segment and each segment has a V-shaped cross section to receive the wafer edge. The top and bottom cushions are installed in the top and bottom container covers, respectively, and extend the wafer support to approximately the entire circumference of each wafer.

Thin wafer shipper

A front opening wafer container suitable for large wafers such as 450 mm utilizes componentry with separate fasteners to lock the componentry together in an expedient manner providing robust connections and cost efficiencies. A container portion has an open front and receives on a bottom surface a base plate secured by twist lock connectors that also provide recesses for purge grommets. Kinematic coupling components readily and robustly lock onto the base plate. Interior wafer support components latch onto brackets on the side walls utilizing a separate locking insert with holding tabs and locking detents. A wafer retainer provides support and counters enhanced wafer sag associated with 450 mm wafers when the door is installed and seated.

Wafer carrier

A front opening wafer container suitable, for large diameter wafers, 300 mm and above, utilizes a removable robotic flange that attaches vertically, without separate fasteners, using detents having resilient bending members that extend vertically to attach to an upwardly extending flange on the top wall of the container portion. A multiplicity of upwardly and outwardly extending strengthening ribs extend upwardly from the top wall of the container portion and extend along the top wall toward the left and right sides and the back side of the container portion, ad each of all four sides of the attachment flange. A further locking piece or core may be inserted and retained at the neck of the robotic flange to lock the resilient deflectable portions in their retention position. The locking piece further may be secured in place with a detent mechanism formed by part of the core and flanges.

Front opening wafer container with robotic flange

Growing community of inventors

Excelsior, MN, United States of America

Barry Lee Gregerson