UChicago Argonne, LLC

Barry Lai

Jorg M Maser

Deming Shu

Franz Stefan Vogt

Christian Roehrig

Curt Alfred Preissner

Jie Liu

Chris J Jacobsen

Steven P Kearney

Oliver A Schmidt

Gregory Brian Stephenson

Jayson W Anton

Michael J Wojcik

Jonathan Z Tischler

Martin V Holt

Robert P Winarski

David Vine

Sophie C Gleber

Wenjun Liu

Joan Vila-Comamala

An enhanced method and precision nanopositioning apparatus for implementing enhanced nanopositioning performance is provided. The nanopositioning apparatus includes a vertical linear nanopositioning flexure stage and a horizontal linear nanopositioning flexure stage. The vertical linear nanopositioning flexure stage includes a stage base, a symmetrically configured flexure linear guiding mechanism with precision motion enhancement structure, and a stage carriage. The horizontal linear nanopositioning flexure stage is mounted on the stage carriage of the vertical linear nanopositioning flexure stage, and includes a middle-bar relative position control mechanism to enhance the stiffness of a flexure linear guiding mechanism.

Method and precision nanopositioning apparatus with compact vertical and horizontal linear nanopositioning flexure stages for implementing enhanced nanopositioning performance

A method and apparatus for implementing an ultra-high stability long-vertical travel stage are provided. The ultra-high stability long-vertical travel stage includes a first wedge supporting a second wedge, each wedge formed of a selected stable material having predefined rigidity and low thermal expansion coefficient, and integrated air bearings. A linear guiding mechanism includes a plurality of flexures. The first wedge is driven in a plane providing vertical motion on the second wedge with the integrated air bearings lifted and the flexures allowing for movement.

Method and apparatus for implementing ultra-high stability long-vertical travel stage

An enhanced mechanical design of multiple zone plates precision alignment apparatus for hard x-ray focusing in a twenty-nanometer scale is provided. The precision alignment apparatus includes a zone plate alignment base frame; a plurality of zone plates; and a plurality of zone plate holders, each said zone plate holder for mounting and aligning a respective zone plate for hard x-ray focusing. At least one respective positioning stage drives and positions each respective zone plate holder. Each respective positioning stage is mounted on the zone plate alignment base frame. A respective linkage component connects each respective positioning stage and the respective zone plate holder. The zone plate alignment base frame, each zone plate holder and each linkage component is formed of a selected material for providing thermal expansion stability and positioning stability for the precision alignment apparatus.

Mechanical design of multiple zone plates precision alignment apparatus for hard X-ray focusing in twenty-nanometer scale

A multifunctional hard x-ray nanoprobe instrument for characterization of nanoscale materials and devices includes a scanning probe mode with a full field transmission mode. The scanning probe mode provides fluorescence spectroscopy and diffraction contrast imaging. The full field transmission mode allows two-dimensional (2-D) imaging and tomography. The nanoprobe instrument includes zone plate optics for focusing and imaging. The nanoprobe instrument includes a stage group for positioning the zone plate optics. The nanoprobe instrument includes a specimen stage group for positioning the specimen. An enhanced laser Doppler displacement meter (LDDM) system provides two-dimensional differential displacement measurement in a range of nanometer resolution between the zone-plate optics and the sample holder. A digital signal processor (DSP) implements a real-time closed-loop feedback technique for providing differential vibration control between the zone-plate optics and the sample holder.

Optomechanical structure for a multifunctional hard x-ray nanoprobe instrument

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Woodridge, IL, United States of America

Barry Lai