Aquest Systems Corporation

Mattson Technology, Inc

Other

Barry Kitazumi

David A Barker

Leszek Niewmierzycki

Michael J Kuhlman

Farzad Tabrizi

David A Setton

Mihir Parikh

Benjamin T Davidson

Michael D Brain

Edmond Ken Lee

A transport system for conveying articles along conveyance paths including straight, curvilinear, horizontal, inclined and declined conveyance sections. The articles are conveyed between a pair of vertical belts while being supported by protrusions extending from the vertical belts. The vertical belts are guided using a multiplicity of vertical rollers that are configurable into straight, curvilinear and dynamically changing conveyance sections. Multiple conveyance sections can be joined end to end to transport articles over complex paths and over long distances. The articles conveyed may include semiconductor wafers.

Transport system including vertical rollers

A transport system including a curved conveyance section configured for moving articles along a curved conveyance path. At least one turnstile wheel is configured to guide the articles along the curved conveyance path. In some embodiments, the turnstile wheel comprises a first surface configured to guide an exterior vertical belt along a continuous curve on an exterior edge of the curved conveyance path and a second surface configured to guide an interior vertical belt along a continuous curve on an interior edge of the curved conveyance path. The first surface and the second surface are configured to have a common axis of rotation outside the curved conveyance path and to rotate at a same angular velocity. The interior vertical belt and the exterior vertical belt are configured to support the articles as the articles are conveyed along the curved conveyance path. The articles are conveyed along the curved conveyance path without stopping or significantly slowing down. The articles conveyed may include semiconductor wafers or substrates for the manufacture of display devices.

Systems and methods for transport through curves

A transport system includes a curved conveyance section configured to move an article along a curved path without significantly slowing or stopping. Exemplary articles for conveyance include semiconductor wafers and substrates for display devices and photovoltaic devices. In some embodiments, the conveyance section includes a turnstile wheel including an interior surface and an exterior surface. The external surface is configured to guide an exterior belt that in turn supports one side of the article around the conveyance path. The internal surface is configured to either support an opposing side of the article, or guide an interior belt that in turn supports the article around the conveyance path. Instead of employing a turnstile wheel, other embodiments employ interior and exterior supports for supporting opposite ends of the article, such as interior and exterior belts, that move at essentially the same angular rate along the inside and outside of the conveyance path.

Systems and methods for transport through curved conveyance sections

A clip used to attach a towel to a golf club, (e.g., a putter). The clip has an opening to attach to the golf club, and an opening to attach to the towel. The clip may be mechanically attached to the club, or may use magnets. The towel may be permanently attached to the clip or may be removable. Methods for attaching a towel to a golf club and manufacturing the clip are also provided.

Putter towel clip

A workpiece handling system with dual load locks, a transport chamber and a process chamber. Workpieces may be retrieved from one load lock for processing at vacuum pressure, while workpieces are unloaded from the other load lock at the pressure of the surrounding environment. The transport chamber has a transport robot with two arms. Processed workpieces and new workpieces may be exchanged by a simple under/over motion of the two robot arms. The transport robot rotates about a central shaft to align with the load locks or the process chamber. The robot may also be raised or lowered to align the arms with the desired location to which workpieces are deposited or from which workpieces are retrieved. The two load locks may be positioned one above the other such that a simple vertical motion of the robot can be used to select between the two load locks. The two load locks and transport robot allow almost continuous processing. Additional process chambers may be added to the transport chamber to further increase throughput. Each stage of the workpiece handling system may also be designed to handle multiple workpieces, such as two side by side workpieces. Throughput is increased while allowing shared machinery to be used. Linear and rotational doors may be used for the load locks to provide a simple, compact design.

Door systems for low contamination, high throughput handling of workpieces for vacuum processing

Systems and methods for low contamination, high throughput handling of workpieces for vacuum processing

A workpiece handling system with dual load locks, a transport chamber and a process chamber. Workpieces may be retrieved from one load lock for processing at vacuum pressure, while workpieces are unloaded from the other load lock at the pressure of the surrounding envirornment. The transport chamber has a transport robot with two arms. Processed workpieces and new workpieces may be exchanged by a simple under/over motion of the two robot arms. The transport robot rotates about a central shaft to align with the load locks or the process chamber. The robot may also be raised or lowered to align the arms with the desired location to which workpieces are deposited or from which workpieces are retrieved. The two load locks may be positioned one above the other such that a simple vertical motion of the robot can be used to select between the two load locks. The two load locks and transport robot allow almost continuous processing. Additional process chambers may be added to the transport chamber to further increase throughput. Each stage of the workpiece handling system may also be designed to handle multiple workpieces, such as two side by side workpieces. Throughput is increased while allowing shared machinery to be used. Linear and rotational doors may be used for the load locks to provide a simple, compact design.

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Milpitas, CA, United States of America

Barry Kitazumi