Commissariat a L'energie Atomique

Barbara Charlet

Louise Peccoud

Thierry Sindzingre

Hélène Le Poche

Yveline Gobil

The invention relates to a method for protecting the interior of at least one cavity () having a portion of interest () and opening onto a face of a microstructured element (), consisting of depositing, on said face, a nonconformal layer () of a protective material, in which said nonconformal layer closes off the cavity without covering the portion of interest. The invention also relates to a method for producing a device comprising such a microstructured element.

Protection of cavities opening onto a face of a microstructured element

The apparatus comprises a tight treatment enclosure (10), means (20,22) for the axial production of a carrier gas plasma, a solid plate (30) serving as an obstacle to the plasma and located perpendicular to the enclosure axis and downstream of the plasma production means, plasma diffusion means (40) located downstream of the obstacle plate, several non-ionized vector gas supply tubes (50) issuing axially into the enclosure beneath the diffusion means and all located in the same plane around the enclosure axis, a substrate carrier (56) positioned downstream of the vector gas supply tubes and perpendicular to the axis and annular pumping means (66,16) for the gaseous medium contained in the enclosure and positioned downstream of the substrate carrier.

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Meylan, France

Barbara Charlet