Carl Zeiss Smt Gmbh

Carl Zelss Smt Ag

Baerbel Trossbach

Hubert Holderer

Ulrich Weber

Alexander Kohl

Johannes Lippert

Juergen Fischer

Wolfgang Hummel

Jochen Weber

Michael Muehlbeyer

Thorsten Rassel

Karl-Eugen Aubele

Erich Merz

Klaus Rief

Raoul Reiner

Markus Neumaier

Stefan Schoengart

Reiner Raoul

An imaging device in a projection exposure machine for microlithography has at least one optical element and at least one manipulator, having a linear drive, for manipulating the position of the optical element. The linear drive has a driven subregion and a nondriven subregion, which are movable relative to one another in the direction of a movement axis. The subregions are interconnected at least temporarily via functional elements with an active axis and via functional elements with an active direction at least approximately parallel to the movement axis.

Imaging device in a projection exposure facility

Growing community of inventors

Aalen, Germany

Baerbel Trossbach