Applied Materials, Inc.

Badri N Krishnamurthy

Shantha Mohan

Parris Hawkins

Charles Q Huang

Patrick M D'Souza

Jett Jensen

Pradeep M Kulkarni

John F Arackaparambil

Prakash M Kulkarni

Wen Fong Lin

Tom Chi

Bishnu Nandy

Billy Chow

Huey-Shin Yuan

Parris C M Hawkins

The present invention provides a novel distributed factory system framework including a novel factory automation lifecycle () having lifecycle activities for SW developing and integrating (), installing and administrating (), factory modeling (), manufacturing planning (), manufacturing controlling, monitoring and tracking () and analyzing of manufacturing results (). The factory lifecycle comprises framework components. The distributed factory system framework also includes application components and building blocks. The framework components are adapted to for managing the application components, while the application components are utilized to provide instructions for managing a process such as a wafer fab. The building blocks are adapted for forming or modifying framework and application components. The distributed factory system framework provides computer implemented methods for integrating processing systems and facilitates process and equipment changes.

Computer integrated manufacturing techniques

The present invention provides a novel distributed factory system framework including a novel factory automation lifecycle () having lifecycle activities for SW developing and integrating (), installing and administrating (), factory modeling (), manufacturing planning (), manufacturing controlling, monitoring and tracking () and analyzing of manufacturing results (). The factory lifecycle comprises framework components. The distributed factory system framework also includes application components and software building blocks. The framework components are adapted for managing the application components, while the application components are utilized to provide instructions for managing a process such as a wafer fab. The building blocks are adapted for forming or modifying framework and application components. The distributed factory system framework provides computer implemented methods for integrating processing systems and facilitates process and equipment changes.

Systems, methods and mediums are provided for automating experiments within an automated environment without the need to disassociate the test subject (e.g., the semiconductor chip or chips) from that environment. An 'experiment' may be a pre-planned deviation of an established (e.g., pre-defined) process utilizing the automated environment. A computer-implemented method, system and computer-readable medium for managing experiments, such as those relating to semiconductor technology. An experiment order includes some deviation from a base process capable of operating in an automated environment. An approval of the experiment order is obtained from a distribution list of users, while permitting the users to attach documents to the experiment order or perhaps modify the experiment. The experiment order is translated into processing data suitable for implementation by said automated environment, and stored. The experiment is caused to be executed in conjunction with at least some portion of said base process via the automated environment according to the processing data.

Experiment management system, method and medium

Growing community of inventors

Mountain View, CA, United States of America

Badri N Krishnamurthy