Memscap

Richemont International S.a.

Tronic's Microsystems

Béatrice Wenk

Greg Hames

Jean-Luc Renaud-Bezot

Alexis Heraud

Luca Ribetto

Pierre-Marie Visse

Rémi Laoubi

Jean-Francois Veneau

Nelly Socquet

Susana Del Carmen Tobenas Borron

Jean-François Veneau

A method for manufacturing a plurality of mechanical resonators () in a manufacturing wafer (), the resonators being intended to be fitted to an adjusting member of a timepiece, the method comprising the following steps: (a) manufacturing a plurality of resonators in at least one reference wafer according to reference specifications, such manufacture comprising at least one lithography step to form patterns of the resonators on or above the reference wafer and a step of machining in the reference plate using the patterns; (b) for the at least one reference plate, establishing a map indicative of the dispersion of stiffnesses of the resonators relative to an average stiffness value; (c) dividing the map into fields and determining a correction to be made to the dimensions of the resonators for at least one of the fields in order to reduce the dispersion; (d) modifying the reference specifications for the lithography step so as to make the corrections to the dimensions for the at least one field in the lithography step; (e) manufacturing resonators in a manufacturing wafer using the modified specifications.

Method for manufacturing a plurality of resonators in a wafer

The invention relates to a pendulous accelerometer including a pendulous electrode formed in a substrate, at least one counter electrode, and an encapsulation cover. The at least one counter electrode is formed under the cover, and spacers are positioned between the cover and the substrate.

Method for manufacturing a pendulous accelerometer

The invention relates to an air variable capacitor including a mobile comb and a fixed comb. Each of the combs include a body and teeth each having an end fixed to the body and free end. The teeth of the mobile and fixed combs being interdigital and an the air-gap of the capacitor is adjustable by the transverse movement of the teeth of the mobile comb. The teeth of the mobile comb have geometric differences between one another, in order to attenuate the transverse resonance modes of the mobile comb.

Air variable capacitor comprising an interdigital mobile comb and fixed comb, accelerometer and gyrometer comprising such a capacitor

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Grenoble, France

Béatrice Wenk