Azbil Corporation

Ayumi Tushima

Tomohisa Tokuda

Yuki Seto

Yoshiyuki Ishikura

Nozomi Kida

A sensor chip () is joined to an inner wall surface () of a base body (-), with a lower surface () of a first retaining member (-) serving as a joint surface, in such a manner as to allow an enclosing chamber () (including a pressure receiving chamber (-) and a pressure guiding passage (-)) between a pressure receiving diaphragm () and the joint surface () of the sensor chip () to communicate with a pressure guiding hole (-) in the first retaining member (-). In this state, a narrow tube () made of stainless steel is passed through the pressure guiding passage (-) in the base body (-) and inserted and secured in the pressure guiding hole (-) in the first retaining member (-). This reduces the pressure receiving area of a pressure guiding passage that guides a pressure (P) of a measured fluid to a first surface (-) of a sensor diaphragm (-), suppresses force applied in the direction of separating the joint between the sensor chip () and the base body (-), and makes it possible to use a soft adhesive.

Growing community of inventors

Chiyoda-ku, Japan

Ayumi Tushima