Canon Kabushiki Kaisha

Ayako Maruyama

Yoshiyuki Nakagawa

Atsushi Kandori

Takuro Yamazaki

Kazutoshi Torashima

Takahiro Akiyama

Takayuki Sumida

Yutaka Setomoto

A liquid discharge head includes a discharge port to discharge a liquid, and a liquid chamber to communicate with the discharge port, and further includes a vibrating plate, and a piezoelectric element. The vibrating plate is disposed on a surface of the liquid chamber on a side facing a surface communicating with the discharge port, and includes a plurality of layers stacked in a layered structure. The piezoelectric element is disposed on a second surface of the vibrating plate being a back surface of a first surface of the vibrating plate in contact with the liquid chamber. The vibrating plate has a recessed portion surrounded by a bottom surface and four lateral surfaces intersecting with the bottom surface on the first surface. The recessed portion penetrates through a first layer having the first surface among the plurality of layers of the vibrating plates.

Liquid discharge head, liquid discharge apparatus, and method for manufacturing liquid discharge head

A liquid ejection head including an ejection port forming part, a flow path forming part including a liquid chamber, and an individual supply flow path configured to supply liquid to the liquid chamber, and a substrate including a supply flow path configured to supply liquid to the individual supply flow path and an outflow flow path configured to cause liquid to flow out of the liquid chamber, wherein a height of the individual supply flow path is larger than a height from a surface of the liquid chamber facing the ejection port to the ejection port forming member, and when viewed from the direction perpendicular to the surface of the substrate, a sidewall surface of the liquid chamber on a side with the supply flow path (1) coincides with an end surface of the ejection port, or (2) is disposed within the ejection port.

Liquid ejection head and liquid ejection apparatus

Provided is a liquid ejection module capable of enhancing the strength of an orifice plate while achieving favorable ejection operation at each ejection port. To that end, the liquid ejection module includes a functional layer in which a plurality of energy generating elements are arranged, a flow channel forming layer in which pressure chambers, individual flow channels, and a common flow channel are formed, and an orifice plate having ejection ports formed therein. The functional layer, the flow channel forming layer and the orifice plate are stacked. In the flow channel forming layer, a beam is formed, extending from a flow channel wall of the common flow channel toward the individual flow channels and supporting the orifice plate in a region facing a first opening.

Liquid ejection module and liquid ejection head

A method includes a step of forming a sacrificial layer on a first film, a step of forming a second film on the sacrificial layer, a step of forming an etching opening that extends through at least one of the first film and the second film so as to communicate with the sacrificial layer, and a step of forming a hollow portion by etching the sacrificial layer using a gas containing a fluorine-containing gas and hydrogen via the etching opening, wherein a composition ratio of silicon to nitrogen in a first region having a face in contact with the sacrificial layer is larger than a composition ratio of silicon to nitrogen in a second region not including the first region.

Method for producing hollow structure and hollow structure

A capacitive micromachined ultrasonic transducer having a wide reception band is provided. The capacitive micromachined ultrasonic transducer includes an element including a first sub-element and a second sub-element each including a cell. The cell includes a vibrating membrane that includes one of two electrodes formed with a spacing therebetween and that is vibratably supported. The capacitive micromachined ultrasonic transducer further includes a first detection circuit, a second detection circuit, and a combining circuit that combines a signal from the first detection circuit and a signal from the second detection circuit. The first sub-element is electrically connected to the first detection circuit, and the second sub-element is electrically connected to the second detection circuit. The first detection circuit and the second detection circuit have different cut-off frequencies.

Growing community of inventors

Sagamihara, Japan

Ayako Maruyama