Canon Kabushiki Kaisha

Ayako Kato

Kazutoshi Torashima

Takahiro Akiyama

Chienliu Chang

Kazunari Fujii

A drive method for an electrostatic capacitance type transducer is provided. The electrostatic capacitance type transducer includes a plurality of elements, the element including one or more cells, the cell having a first electrode and a second electrode separated from the first electrode by a gap, the first electrode or the second electrode in the plurality of elements being applied with an alternating current voltage. The plurality of elements includes a first element and a second element. A waveform of an alternating current voltage applied to the first element is set the similar as a waveform of an alternating current voltage applied to the second element. A phase difference between the alternating current voltage applied to the first element and the alternating current voltage applied to the second element is set equal to approximately 90 degrees.

Electrostatic capacitance type transducer and drive method therefor

A capacitive micromachined ultrasonic transducer includes a first insulating film and a second insulating film disposed with a gap therebetween, a first electrode and a second electrode disposed on outer surfaces of the first and second insulating films, respectively, with the gap therebetween, at least one cell having an electrostatic capacitance between the first and second electrodes that varies with a variation of a thickness of the gap caused by displacement of the second insulating film and the second electrode, and a voltage applying unit configured to apply a voltage to between the first electrode and the second electrode. An electric field strength applied to the first insulating film is closer to an electric field strength that causes dielectric breakdown than an electric field strength applied to the second insulating film.

Capacitive micromachined ultrasonic transducer and test object information acquiring apparatus including capacitive micromachined ultrasonic transducer

Provided are a method, a device and the like for driving a capacitance transducer that enable reduction of transmission sound pressure variation caused by variation in characteristics of a capacitance transducer used for, e.g., an ultrasound conversion element. A method for driving a capacitance transducer including a plurality of elements each including cells each having a structure in which a vibration membrane including one electrode of a pair of electrodes formed with a cavity therebetween is supported in such a manner that the vibration membrane can vibrate is provided.

Method and device for driving capacitance transducer

A transducer includes at least one element including a plurality of cells. Each of the cells includes a pair of electrodes disposed with a gap therebetween and a vibrating membrane including one of the electrodes, and the vibrating membrane is vibratably supported. First and second cells of the plurality of cells in the element have the gaps that communicate with each other, and the first cell and a third cell in the element have the gaps that do not communicate with each other.

Transducer, method for manufacturing transducer, and object information acquiring apparatus

Disclosed is an electromechanical transducer, including: a cell including a substrate, a vibration film, and a supporting portion of the vibration film configured to support the vibration film so that a gap is formed between the substrate and the vibration film; and a lead wire that is placed on the substrate with an insulator interposed therebetween and extends to the cell, wherein the insulator has a thickness greater than the thickness of the supporting portion. The electromechanical transducer can reduce parasitic capacitance to prevent an increase in noise, a reduction in bandwidth, and a reduction in sensitivity.

Electromechanical transducer and method of manufacturing the same

A technology that makes it possible to adjust, through processing, an output signal sent from a capacitive electromechanical transducer apparatus such as a CMUT upon reception of an elastic wave is provided. A capacitive electromechanical transducer apparatusincludes cellsthat include a first electrodeand second electrodes, each of which is disposed so as to be opposite the first electrodewith a cavitytherebetween. In the capacitive electromechanical transducer apparatus, at least one of the cellsincludes a processed unit on which at least either addition of a material or removal of a material is performed as processing.

Capacitive electromechanical transducer apparatus and method for adjusting its sensitivity

Provided is a method of manufacturing an electromechanical transducer having a reduced variation in a breakdown strength caused by a variation in flatness of an insulating layer. In the method of manufacturing the electromechanical transducer, a first insulating layer is formed on a first substrate, a barrier wall is formed by removing a part of the first insulating layer, and a second insulating layer is formed on a region of the first substrate after the part of the first insulating layer has been removed. Next, a gap is formed by bonding a second substrate on the barrier wall, and a vibration film that is opposed to the second insulating layer via the gap is formed from the second substrate. In the forming of the barrier wall, a height on a gap side in a direction vertical to the first substrate becomes lower than a height of a center portion.

Method of manufacturing an electromechanical transducer

A groove is formed on a handling member, on a face to be fixed to an element, the groove making up a portion of a channel that externally communicates in the state of being fixed to the element. In the fixing process of the substrate and then handling member, the handling member is fixed so that the edge direction of the vibrating membrane supporting portion and the edge direction of the groove of the handling member intersect. Thus, the probability that a membrane will break during handling or processing of the substrate is reduced, and the handling member can be quickly removed from the substrate.

Manufacturing method of an electromechanical transducer

A groove is formed on a handling member, on a face to be fixed to an element, the groove making up a portion of a channel that externally communicates in the state of being fixed to the element. The handling member is fixed so that the cleavage direction of the vibrating membrane and the edge direction of the groove of the handling member intersect. Thus, the probability that a membrane will break during handling or processing of the substrate is reduced, and the handling member can be quickly removed from the substrate.

A handling member is prepared that provides a channel that can withstand subsequent back face processing as to a substrate having elements made up of a substrate and a membrane, and the handling member is fixed to the substrate so that at least a portion within the elements are supported by the handling member. This provides a manufacturing method wherein the physical strength of an element at the time of manufacturing an electromechanical transducing apparatus is strengthened, and the handling member is easily detached in a short time after processing of the element.

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Kawasaki, Japan

Ayako Kato