Mitutoyo Corporation

Avron Zwilling

Joseph Daniel Tobiason

Michael Nahum

Kim W Atherton

Scott Allen Harsila

Benjamin K Jones

Casey Edward Emtman

Karl Gustav Masreliez

Mike Goldsworthy

Patrick A Renalds

A reference mark configuration for an interferometric miniature grating encoder readhead using fiber optic receiver channels is provided. The readhead includes primary fibers that provide reference mark primary signals processed to generate a reference signal with accuracy of approximately 0.2 microns. The readhead may include secondary fibers used to generate reference mark secondary signals processed to generate a reference signal with accuracy of approximately 20 nanometers. Spatial filter masks configured for the secondary fiber optic receiver channels provide two spatially periodic secondary signals arising from interference fringes outside of the receiving area of the primary fiber optic receiver channels. The secondary signals are out of phase with one another and their spatial frequency is higher than that of the primary signals. A signal crossing of the reference mark secondary signals is identified that is spatially adjacent to a signal crossing of the reference mark primary reference signals.

Reference signal generating configuration for an interferometric miniature grating encoder readhead using fiber optic receiver channels

All-optical output precision measuring gauges that sense the displacement of an internal scale grating are disclosed. Each type of gauge includes a compact, miniature, or ultra-miniature optical readhead that includes a light source for transmitting light to the scale grating, and optical-fiber detector channels for receiving light from the scale grating and outputting optical measuring signals from the gauge. In various embodiments, the optical-fiber detector channels have respective phase grating masks for receiving a periodic light pattern that moves in correspondence to the scale grating, and the channels are arranged in balanced pairs. In various embodiments, the optical readhead is an interferometric-type optical readhead that provides a measuring resolution as fine as 10&#x2013;50 nanometers or less. In various embodiments, the gauge is provided in an unprecedented miniature size. In various embodiments, the gauge is motorized to provide a precision actuator.

Precision measuring gauges with optical fiber output channels

An absolute 2D position-sensing device is usable to measure the relative position of two elements. A 2D absolute scale includes an integrated 2D absolute scale pattern extending over the 2D scale area along each measuring axis of the scale. The integrated 2D absolute scale pattern includes a plurality of periodic portions interleaved with a plurality of non-periodic portions along each axis. Each periodic portion includes a plurality of periodically-placed scale elements. Each non-periodic portion includes a plurality of code elements indicative of an absolute measurement value. The code elements may have a length that is narrower along each measuring axis is than the length of the periodic scale elements along each measuring axis. The offset of the periodically-placed elements relative to a readhead of the device is combined with the absolute measurement value to determine an absolute position.

Two-dimensional scale structures and method usable in an absolute position transducer

An absolute position-sensing device is usable to measure the relative position of two elements. An absolute scale includes an integrated track extending along a measuring axis of the scale. The integrated track includes a plurality of periodic portions interleaved with a plurality of non-periodic portions. Each periodic portion includes a plurality of periodically-placed scale elements. Each non-periodic portion includes a plurality of code elements indicative of an absolute measurement value. The code elements may have a length that is narrower along the measuring axis than the length of the periodic scale elements. The offset of the periodic-placed elements relative to a readhead of the device is combined with the absolute measurement value to determine an absolute position.

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Redmond, WA, United States of America

Avron Zwilling