Applied Materials, Inc.

State of Israel, Ministry of Defense, Rafael Armament & Development

State of Israel - Ministry of Defense Rafael Armament Development Authority

Syneron Medical Ltd.

Avner Rosenberg

Joseph Shiloh

Elhanan Wurzberg

Kevin T Schomacker

Joseph Statlender

Stela Diamant Lazarovich

The present invention provides a DBD cell ( ) including ring shaped electrodes ( and ) that are positioned side-by-side on a dielectric tube ( ). An AC power supply ( ) is provided such that the cell and the power supply form a DBD treatment device ( ) for abatement of noxious gases for example FCs that can be discharged from semiconductor fabricating devices. Additionally, one or more sensors ( ) and/or one or more gas addition ports ( ) can be included in a DBD cell ( ) of the present invention. Several DBD cells ( and ) of the present invention can be combined to form a DBD reactor ( ) of the present invention. AC power supplies ( and ) are utilized to energize the cells ( and ).

Plasma treatment of processing gases

A device (,) for purifying a gas stream (,) made up of a plurality of DBD cells (,) in series and, for each of the DBD cells (,), a power supply (,) for providing alternating current to each DBD cell (,).

Modular dielectric barrier discharge device for pollution abatement

An electromagnetic pulse simulator includes two large-area electrodes mounted in spaced apart relation, and a high voltage generator electrically connected to the two electrodes to apply a high voltage between them. The electrical connection of the high-voltage generator and at least one of the electrodes comprises a plurality of electrical conductors in mutually-spaced relation with each conductor being enclosed within an insulating sheath filled with an insulating gas under pressure.

Electromagnetic pulse simulator

Growing community of inventors

Beit Shearim, Israel

Avner Rosenberg