Tower Semiconductor Ltd.

Avi Ben-Guigui

Yakov Roizin

Efraim Aloni

Ira Naot

Yossi Netzer

Shai Kfir

Myriam Buchbinder

Menchem Vofsy

A pre-metal dielectric structure of a single-poly EEPROM structure includes a UV light-absorbing film, which prevents the charge on a floating gate of the EEPROM structure from being changed in response to UV radiation. In one embodiment, the pre-metal dielectric structure includes a first pre-metal dielectric layer, an amorphous silicon layer located over the first pre-metal dielectric layer, and a second pre-metal dielectric layer located over the amorphous silicon layer.

Ultra-violet protected tamper resistant embedded EEPROM

A fieldless array of floating gate transistors is fabricated by forming an oxide-nitride-oxide (ONO) layer over a semiconductor substrate. A mask is formed over the ONO layer, the mask having openings that define a plurality of bit line regions of the floating gate transistors in the substrate. A first impurity is implanted into the bit line regions of the substrate, wherein the first impurity is implanted through the ONO layer, through the openings of the mask. The first impurity is implanted at various angles, such that the first impurity is implanted in the substrate at locations beneath the mask. The upper oxide and nitride layers of the ONO layer are subsequently etched through the mask openings. A second impurity is implanted in the substrate through the openings of the mask. The mask is removed, and the substrate is oxidized, thereby forming bit line oxide regions over the bit line regions, and floating gate structures. A plurality of gate electrodes are formed over the bit line oxide regions and the floating gate structures, thereby completing the fieldless array of floating gate transistors. Process steps are also provided for fabricating high voltage and low voltage CMOS transistors on the same wafer as the fieldless array.

Methods for fabricating a semiconductor chip having CMOS devices and a fieldless array

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Migdal Haemek, Israel

Avi Ben-Guigui