Commissariat &#xc0; L'&#xc9;nergie Atomique Et Aux &#xc9;nergies Alternatives

Université De Franche Comte

Ecole Nationale Superieure De Mecanique Et Des Microtechniques

Centre National De La Recherche Scientifique

Universite Dé Lorraine

Frec'n'sys

Ausrine Bartasyte

Alexandre Reinhardt

Marie Bousquet

Omar El Mazria

Florent Bassignot

Ludovic Gauthier-manuel

Sylvain Ballandras

Samuel Margueron

Roland Salut

Giacomo Clementi

Merieme Ouhabaz

A process for fabricating a micro-electro-mechanical system, includes the following steps: production of a stack on the surface of a temporary substrate so as to produce a first assembly, comprising: at least depositing a piezoelectric material or a ferroelectric material to produce a layer of piezoelectric material or of ferroelectric material; producing a first bonding layer; production of a second assembly comprising at least producing a second bonding layer on the surface of a host substrate; production of at least one acoustic isolation structure in at least one of the two assemblies; production of at least one electrode level containing one or more electrodes in at least one of the two assemblies; bonding the two assemblies via the two bonding layers, before or after the production of the at least one electrode level in at least one of the two assemblies; removing the temporary substrate.

Process for producing a micro-electro-mechanical system from a transferred piezoelectric or ferroelectric layer

Growing community of inventors

Le Duc, France

Ausrine Bartasyte