Taiyo Yuden Co., Ltd.

Research Development Corporation of Japan

Japan as Represented by Director General of Agency of Industrial Science

Taiyo Yuden Kabushiki Kaisha

President of Kogyo Gijutuin

Atuo Itoh

Yutaka Hayashi

Hideyo Iida

Kikuji Fukai

Mizuho Imai

This invention relates to a method for forming a transparent conductive metal oxide film having good characteristic properties. The method comprises feeding an atomized or gasified starting material onto a substrate to form a metal oxide film on the substrate, wherein the substrate is heated to form a first metal oxide film having a good degree of orientation of crystals and a second film formation step wherein a second metal oxide film is formed on the first metal oxide film under higher substrate temperature conditions than those in the first film formation step to form a second metal oxide film having a degree of orientation of crystals in conformity with that of the first metal oxide film.

Method for forming a transparent conductive metal oxide film

A mist supplying device for supplying a film-forming solution to form a thin film on a substrate includes a nozzle having an elongate outlet port, an atomizer coupled to the nozzle for atomizing the film-forming solution, and a disperser movably disposed in the nozzle between the outlet port and the atomizer and having a plurality of substantially uniformly distributed mist passages for passing the atomized film-forming solution in a first flow passage direction therethrough. An air blower is coupled to the atomizer for delivering the atomized film-forming solution into the nozzle. A driver unit is coupled to the disperser for reciprocally moving the mist passages in a second flow passage direction transverse to the first flow passage direction.

Mist supplying device for forming thin film

Growing community of inventors

Tokyo, Japan

Atuo Itoh