Mks Instruments, Inc.

Koninklijke Philips Corporation N.v.

Axcelis Technologies, Inc.

Atul Gupta

Xing Chen

Molly Lara Flexman

Ashish Panse

Colin Sanford

Kevin Wenzel

Ilya Pokidov

Chiu-Ying Tai

Michael Harris

Joshua Lamontagne

Shyam Bharat

Ameet Kumar Jain

Ramon Quido Erkamp

Jean-Luc Francois-Marie Robert

Vijay Parthasarathy

Man Nguyen

Kunal Vaidya

Johannes Chiu

Scott E Galica

A plasma chamber of a plasma processing system is provided. The plasma chamber defines a plasma channel having a first side and a second side oppositely disposed along a length of the plasma channel. The plasma chamber comprises a first section and a second section constructed from a dielectric material and an interface that bonds together the first and second sections at between a first flange of the first section and a third flange of the second section and between a second flange of the first section and a fourth flange of the second section.

Plasma source having a dielectric plasma chamber with improved plasma resistance

A thermal electrostatic clamp has a central electrostatic portion associated with a central region of a workpiece. A central body has a clamping surface and one or more electrodes are associated with the central body. One or more electrodes selectively electrostatically clamp at least the central region of the workpiece to the clamping surface based on an electrical current passed therethrough. One or more first heaters of the central body selectively heat the central electrostatic portion to a first temperature. A non-electrostatic peripheral portion associated with a peripheral region of the workpiece has a peripheral body encircling the central body, separated by a gap. The peripheral body is positioned beneath the peripheral region of the workpiece. The peripheral portion does not electrostatically clamp the peripheral region of the workpiece. One or more second heaters of the peripheral body selectively heat the non-electrostatic peripheral portion to a second temperature.

Hybrid high-temperature electrostatic clamp for improved workpiece temperature uniformity

An augmented reality trigger system () comprising a primary augmented reality device () and a trigger action controller () for implementing an augmented reality trigger method based on a medical tool () and/or a tool identifier ()associated with the medical tool (). In operation, the primary augmented reality device () generates a camera image of the real world, which may or may not at any time include the medical tool () and/or the tool identifier (). The trigger action controller () recognizes a generation by the primary augmented reality device () of the camera image of the real world including the medical tool () and/or the toolidentifier () and in response to such recognition, triggers a medical procedure action by the primary augmented reality device () and/or a medical device () in support of a medical procedure involving the medical tool ().

Augmented reality triggering of devices

An ultrasound imaging system according to the present disclosure may include an ultrasound transducer assembly comprising a plurality of apertures that are configured to transmit signals toward and receive signals from a region of interest (ROI) of a subject, a tracking sensor disposed within the subject and configured to move within the ROI, the sensor being responsive to signals transmitted by the apertures, and at least one processor in communication with the ultrasound transducer assembly and the tracking sensor. The at least one processor may be configured to generate a first image of a first portion of the ROI from signals received from at least one activated aperture, identify a position of the tracking sensor using signal data from the tracking sensor that corresponds to at least one signal transmitted by the apertures, and generate a second image of a second portion of the ROI from signals received from at least one other aperture activated based on the identified position, wherein the second portion of the ROI is different from the first portion of the ROI.

Large area ultrasound transducer assembly and sensor tracking for aperture control and image gneration

The present application is directed to a multi-sensor gas sampling detection system and method for detecting and measuring the radicals in a radical gas stream and includes at least one radical gas generator in communication with at least one gas source. The radical gas generator may be configured to generate at least one radical gas stream which may be used within a processing chamber. As such, the processing chamber is in fluid communication with the radical gas generator. At least one analysis circuit in fluid communication with the radical gas generator may be used in the detection and measurement system. The analysis may be configured to receive a defined volume and/or flow rate of the radical gas stream. In one embodiment, the analysis circuit may be configured to react at least one reagent with radicals within the defined volume of the radical gas stream thereby forming at least one chemical species within at least one compound stream. At least one sensor module within the analysis circuit may be configured to measure a concentration of the chemical species within the compound stream. One or more flow measurement modules may be in fluid communication with the sensor module. During use, the flow measurement module may be configured to measure the volume of at least one of the compound stream and radical gas stream.

Multi-sensor gas sampling detection system for radical gases and short-lived molecules and method of use

The present application discloses a device for radical monitoring a plasma source for a remote plasma source used in a processing system and includes at least one gas source, a plasma source body having at least one passage having at least one passage surface, a first thermal sensor receiver may be formed within the plasma source body proximate to the passage surface of the passage, a first thermal sensor positioned within the first thermal sensor receiver configured to measure a first temperature of the passage surface, a second thermal sensor receiver formed within the plasma source body proximate to the passage surface of the passage and configured to measure a second temperature of the passage surface of the passage at a second location.

Radical output monitor for a remote plasma source and method of use

A controller for augmenting reality includes a memory that stores instructions, and a processor that executes the instructions. The controller receives, from at least one device that provides output via a display, an information feed comprising first visual information from the at least one device. When executed by the processor, the instructions cause the controller to execute a process comprising controlling generation of first visual information in a first shared portion of a three-dimensional (3D) space by a first augmented reality device as augmented reality, and controlling generation of the first visual information in the first shared portion of the 3D space by a second augmented reality device as augmented reality.

Augmented reality for collaborative interventions

An apparatus and method for determining the health of a plasma system by igniting a plasma within a plasma confining volume generate an ignition signal with an ignition circuit and apply the ignition signal between a biased region and a grounded region in the vicinity of the plasma confining volume. A parameter in the ignition circuit is sensed, and the sensed parameter is compared to a first parameter threshold. A condition associated with the plasma confining volume is determined if the sensed parameter differs from the first voltage threshold, and a corrective action can be taken.

Growing community of inventors

Andover, MA, United States of America

Atul Gupta