Jeol Ltd.

Canon Anelva Corporation

Atsuyuki Ichikawa

Yuki Endo

Taichi Hiromi

Hidetoshi Shimokawa

Naohiro Kosaka

Yutaka Horino

A rotation mechanism includes a bearing mechanism and a drive mechanism. Prior to loading of a sample unit, bearing gas is supplied to a bearing mechanism. In the course of inserting the sample unit, bearing gas is sprayed to a surface of the sample tube from around the sample tube to thereby center the sample unit.

System for centering a sample tube for use with an NMR measurement system and sample tube centering method

A sputtering apparatus includes a space defining member defining a sputtering space for forming a film on a substrate. The space defining member includes a concave portion, and an opening portion is provided in the bottom portion of the concave portion. The sputtering apparatus includes a shield member configured to shield the opening portion from the sputtering space. The opening portion is formed so that a pressure gauge capable of measuring the pressure in the sputtering space can be attached, and the shield member is arranged so that at least a part of the shield member is buried in the concave portion.

Sputtering apparatus and processing apparatus

Growing community of inventors

Tokyo, Japan

Atsuyuki Ichikawa