Mitutoyo Corporation

Atsushi Tsuruta

Yoshiyuki Omori

Tsukasa Kojima

Hideki Shindo

Ryosuke Watanabe

Eiji Okada

Syuuzou Ueno

Shuuzou Ueno

An air bearing drive system has a base, a moving portion, an air bearing for forming an air film gap between the base and the moving portion, air nozzles and a suction inlet. The air nozzles and suction inlet are formed on the base. The air nozzles blow air toward the moving portion so as to exert a levitation force on the moving portion. The suction inlet applies suction to the air film gap so as to attract the moving portion toward the base and thereby exert an attraction force on the moving portion. An air supplying device supplies air to the air nozzles. A vacuum source applies suction to the suction inlets. Two adjusting devices are adapted to adjust the levitation force produced by the air issuing from the air nozzles and the attraction force of air drawn into the suction inlet so as to provide an accurate and low cost air bearing drive system.

Air bearing drive system

A compensation method according to the present invention includes: a traverse linearity data calculating step for measuring a master workpiece (MW) of which profile data is value-specified in advance while moving a sensor ( ) using a linear movement mechanism ( ) of a measuring device ( ) and for subtracting the previously value-specified profile data from the measurement data of the master workpiece to obtain a traverse linearity data of the linear movement mechanism; a workpiece measurement data calculating step for measuring the workpiece while moving the sensor by the linear movement mechanism of the measuring device to obtain a measurement data of the workpiece; and a workpiece profile calculating step for subtracting the traverse linearity data from the workpiece measurement data to obtain a true value data of the workpiece.

Traverse linearity compensation method and rotational accuracy compensation method of measuring device

An eccentricity adjusting motor ( ) is provided in eccentricity adjusting device ( ) that adjusts an eccentricity in a work. A tilt adjusting motor ( ) is also provided in tilt adjusting device ( ) that adjusts a tilt of the work. A processor ( ) computes the eccentricity and tilt of the work, based on which eccentricity/tilt compensating means ( ) control the motors ( ) to compensate the eccentricity and tilt of the work.

Method and apparatus for measuring roundness

A surface-following type measuring machine is provided, which is capable of setting the measuring force to a proper value in an efficient and accurate manner without imposing a burden on the operator in exchanging at least one of the stylus and stylus holder according to the surface contour of an object to be measured. A main body is disposed for movement relative to an object to be measured. A measuring arm is supported by the main body for displacement relative thereto, and carries at one end thereof a stylus holder and a stylus in a manner permitting replacement of the stylus holder and the stylus. Displacement of the measuring arm is detected by a displacement detecting device. The measuring force acting upon the measuring arm is adjusted by a measuring force adjusting device. A memory stores a measuring force command value table having a plurality of command values of the measuring force corresponding respectively to combinations of plural kinds of the stylus holder and plural kinds of the stylus. A kind of the stylus holder and a kind of the stylus after replacement of at least one of the stylus holder and the stylus are designated by an input device. A controller reads a command value of the measuring force corresponding to a combination of the kind of the stylus holder and the kind of the stylus after replacement, which are designated, and delivers the read command value of the measuring force to the measuring force adjusting device.

Surface-following type measuring machine

A driving arrangement is provided for a measuring instrument having a movable element which is movable relative to a measuring instrument body. Measurement of an object to be measured is carried out through movement of the movable element. A driving and guide device is mounted on the measuring instrument body, and includes a driving cylinder having a piston received therein for axial movement. The movable element is moved in synchronism with the axial movement of the piston. A hydraulic fluid control device is arranged at a location remote from the measuring instrument body, for supplying hydraulic fluid to the driving cylinder of the driving and guide device to cause the axial movement of the piston of the driving cylinder.

Driving arrangement for measuring instruments, and measuring instrument incorporating same

A detecting device for detecting fluctuation of an arm, to which a stylus is attached, comprises a linear guide installed to an arm supporting member and for guiding vertical or horizontal linear movement, a scale supporting member so installed to the linear guide as to be linearly movable, a jointing mechanism for converting circular arc movement caused by fluctuation of the arm to linear movement of the scale supporting member guided with the linear guide, the jointing mechanism having a jointing pin inserted between a projection integrally formed with the arm at a position of a given distance from an axis supporting part of the arm and the scale supporting member, and a displacement detecting device composed of a scale installed to the scale supporting member for detecting displacement by the linear movement.

Growing community of inventors

Kure, Japan

Atsushi Tsuruta