Alps Electric Co., Ltd.

Tdk Corporation

Atsushi Tondokoro

Hisayuki Yazawa

Sumihito Morita

Takashi Sato

Hisanobu Okawa

Satoshi Waga

Shinya Yokoyama

Shuji Yanagi

Shinichi Tanaka

A humidity sensing portion is mounted in a gap between a first opposite member and a second opposite member. Metal joints and dummy joints are provided in the gap between the first opposite member and the second opposite member, and the two opposite members are fixed to each other through the metal joints and the dummy joints. Since only the metal joints and the dummy joints are present in the gap between the two opposite members, gas to be measured is easily introduced into the humidity sensing portion, and the sensing response to the humidity change is improved.

Humidity sensing apparatus

A humidity detection sensor includes a lower electrode provided on a board, an upper electrode provided so as to face the lower electrode, a humidity sensing film which is formed at least between the lower electrode and the upper electrode and whose dielectric constant changes in response to humidity, and a protective film provided so as to cover the upper electrode. Each of the upper electrode and the protective film has an opening through which the humidity sensing film is partially exposed to the outside. In the opening, the humidity sensing film is provided so as to reach at least a position higher than the position of the lower surface of the protective film.

Humidity detection sensor and a method for manufacturing the same

A method of processing an air bearing surface of a thin-film magnetic head slider is provided. A first silicon film, a first carbon film, a second silicon film, and a second carbon film are laminated in that order on a face of a thin-film magnetic head slider facing a medium. A protrusion resist pattern that forms protrusions is formed on the second carbon film. Portions of the second carbon film and the second silicon film that are not covered with the protrusion resist pattern are removed by reactive ion etching with O/CF. A third carbon film is formed on the first carbon film exposed by the removal of the portions. The protrusion resist pattern is removed to expose the protrusions including the second silicon film and the second carbon film. An ABS resist pattern is formed on exposed surfaces of the protrusions and the third carbon film. A surface not covered with the ABS resist pattern is processed to impart an ABS uneven pattern.

Air bearing surface of thin-film magnetic head slider and method of processing the same

Growing community of inventors

Niigata-ken, Japan

Atsushi Tondokoro